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- W4281894328 endingPage "012010" @default.
- W4281894328 startingPage "012010" @default.
- W4281894328 abstract "Abstract In MEMS technology, MEMS Resonators has shown high potential applications in wireless communications such as Bluetooth and WIFI range. The Bulk Acoustic Wave (BAW) Resonator is a device which has more potential to meet the needs of today’s wireless technology. The Acoustic wave technology has attracted more attention and it’s an effective solution for achieving high-performance RF filters applications due to its low cost and small size of the device. The performance analysis of thin film bulk acoustic resonator (FBAR) by varying different piezoelectric material, piezoelectric material’s thickness and electrode materials is demonstrated in this paper. It is understood that the Quality factor is considerable higher for AlN as compared to ZnO and LiNbO3. Among all the materials, Aluminium electrode achieved maximum quality factor. As the thickness of piezo material decreases, it is found that the resonant frequency and Quality factor increases. Along with the Quality Factor, the top and bottom electrode thickness has a significant impact on the resonant frequency." @default.
- W4281894328 created "2022-06-13" @default.
- W4281894328 creator A5035635369 @default.
- W4281894328 creator A5067923286 @default.
- W4281894328 creator A5089997326 @default.
- W4281894328 date "2022-05-01" @default.
- W4281894328 modified "2023-09-26" @default.
- W4281894328 title "Analysis and Enhancement of Q-Factor in Thin-Film Bulk Acoustic Wave Resonator (FBAR)" @default.
- W4281894328 cites W2569008205 @default.
- W4281894328 cites W2736179950 @default.
- W4281894328 cites W2743778281 @default.
- W4281894328 cites W2903519092 @default.
- W4281894328 cites W2903919328 @default.
- W4281894328 cites W2913216977 @default.
- W4281894328 cites W4230392251 @default.
- W4281894328 doi "https://doi.org/10.1088/1742-6596/2273/1/012010" @default.
- W4281894328 hasPublicationYear "2022" @default.
- W4281894328 type Work @default.
- W4281894328 citedByCount "1" @default.
- W4281894328 countsByYear W42818943282023 @default.
- W4281894328 crossrefType "journal-article" @default.
- W4281894328 hasAuthorship W4281894328A5035635369 @default.
- W4281894328 hasAuthorship W4281894328A5067923286 @default.
- W4281894328 hasAuthorship W4281894328A5089997326 @default.
- W4281894328 hasBestOaLocation W42818943281 @default.
- W4281894328 hasConcept C100082104 @default.
- W4281894328 hasConcept C119599485 @default.
- W4281894328 hasConcept C121332964 @default.
- W4281894328 hasConcept C127413603 @default.
- W4281894328 hasConcept C159985019 @default.
- W4281894328 hasConcept C17525397 @default.
- W4281894328 hasConcept C187725362 @default.
- W4281894328 hasConcept C192562407 @default.
- W4281894328 hasConcept C24890656 @default.
- W4281894328 hasConcept C2779530757 @default.
- W4281894328 hasConcept C37977207 @default.
- W4281894328 hasConcept C41008148 @default.
- W4281894328 hasConcept C49040817 @default.
- W4281894328 hasConcept C546215728 @default.
- W4281894328 hasConcept C555944384 @default.
- W4281894328 hasConcept C62520636 @default.
- W4281894328 hasConcept C76155785 @default.
- W4281894328 hasConcept C97126364 @default.
- W4281894328 hasConceptScore W4281894328C100082104 @default.
- W4281894328 hasConceptScore W4281894328C119599485 @default.
- W4281894328 hasConceptScore W4281894328C121332964 @default.
- W4281894328 hasConceptScore W4281894328C127413603 @default.
- W4281894328 hasConceptScore W4281894328C159985019 @default.
- W4281894328 hasConceptScore W4281894328C17525397 @default.
- W4281894328 hasConceptScore W4281894328C187725362 @default.
- W4281894328 hasConceptScore W4281894328C192562407 @default.
- W4281894328 hasConceptScore W4281894328C24890656 @default.
- W4281894328 hasConceptScore W4281894328C2779530757 @default.
- W4281894328 hasConceptScore W4281894328C37977207 @default.
- W4281894328 hasConceptScore W4281894328C41008148 @default.
- W4281894328 hasConceptScore W4281894328C49040817 @default.
- W4281894328 hasConceptScore W4281894328C546215728 @default.
- W4281894328 hasConceptScore W4281894328C555944384 @default.
- W4281894328 hasConceptScore W4281894328C62520636 @default.
- W4281894328 hasConceptScore W4281894328C76155785 @default.
- W4281894328 hasConceptScore W4281894328C97126364 @default.
- W4281894328 hasIssue "1" @default.
- W4281894328 hasLocation W42818943281 @default.
- W4281894328 hasOpenAccess W4281894328 @default.
- W4281894328 hasPrimaryLocation W42818943281 @default.
- W4281894328 hasRelatedWork W1498025844 @default.
- W4281894328 hasRelatedWork W1520363858 @default.
- W4281894328 hasRelatedWork W1554328953 @default.
- W4281894328 hasRelatedWork W2004252133 @default.
- W4281894328 hasRelatedWork W2101239713 @default.
- W4281894328 hasRelatedWork W2109132618 @default.
- W4281894328 hasRelatedWork W2244350851 @default.
- W4281894328 hasRelatedWork W2568152611 @default.
- W4281894328 hasRelatedWork W2954823985 @default.
- W4281894328 hasRelatedWork W3217179084 @default.
- W4281894328 hasVolume "2273" @default.
- W4281894328 isParatext "false" @default.
- W4281894328 isRetracted "false" @default.
- W4281894328 workType "article" @default.