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• W4282938004 endingPage "9290" @default.
• W4282938004 startingPage "9278" @default.
• W4282938004 abstract "Due to its unique optical, electrical, and chemical properties, tin dioxide (SnO2) thin films attract enormous attention as a potential material for gas sensors, catalysis, low-emissivity coatings for smart windows, transparent electrodes for low-cost solar cells, etc. However, the low-cost and high-throughput fabrication of SnO2 thin films without producing corrosive or toxic by-products remains challenging. One appealing deposition technique, particularly well-adapted to films presenting nanometric thickness is atomic layer deposition (ALD). In this work, several metalorganic tin-based complexes, namely, tin(IV) tert-butoxide, bis[bis(trimethylsilyl)amino] tin(II), dibutyltin diacetate, tin(II) acetylacetonate, tetrakis(dimethylamino) tin(IV), and dibutyltin bis(acetylacetonate), were explored thanks to DFT calculations. Our theoretical calculations suggest that the three last precursors are very appealing for ALD of SnO2 thin films. The potential use of these precursors for atmospheric-pressure spatial atomic layer deposition (AP-SALD) is also discussed. For the first time, we experimentally demonstrate the AP-SALD growth of SnO2 thin films using tin(II) acetylacetonate (Sn(acac)2) and water. We observe that Sn(acac)2 exhibits efficient ALD activity with a relatively large ALD temperature window (140-200 °C), resulting in a growth rate of 0.85 ± 0.03 Å per cyc. XPS analyses show a single Sn 3d5/2 characteristic peak for Sn4+ at 486.8 ± 0.3 eV, indicating that a pure SnO2 phase is obtained within the ALD temperature window. The as-deposited SnO2 thin films are in all cases amorphous, and film conductivity increases with the deposition temperature. Hall effect measurements confirm the n-type nature of SnO2 with a free electron density of about 8 × 1019 cm-3, electron mobility up to 11.2 cm2 V-1 s-1, and resistivity of 7 × 10-3 Ω cm for samples deposited at 270 °C." @default.
• W4282938004 created "2022-06-16" @default.
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• W4282938004 date "2022-01-01" @default.
• W4282938004 modified "2023-10-16" @default.
• W4282938004 title "Atmospheric atomic layer deposition of SnO₂ thin films with tin(<scp>ii</scp>) acetylacetonate and water" @default.
• W4282938004 cites W1529053979 @default.
• W4282938004 cites W1973277081 @default.
• W4282938004 cites W1974557064 @default.
• W4282938004 cites W1974675977 @default.
• W4282938004 cites W1981368803 @default.
• W4282938004 cites W1982318875 @default.
• W4282938004 cites W1986667543 @default.
• W4282938004 cites W1987345373 @default.
• W4282938004 cites W1990200991 @default.
• W4282938004 cites W1997012525 @default.
• W4282938004 cites W2004668025 @default.
• W4282938004 cites W2010987099 @default.
• W4282938004 cites W2023603575 @default.
• W4282938004 cites W2026924616 @default.
• W4282938004 cites W2038064681 @default.
• W4282938004 cites W2044159359 @default.
• W4282938004 cites W2061114932 @default.
• W4282938004 cites W2066998545 @default.
• W4282938004 cites W2078186777 @default.
• W4282938004 cites W2083222334 @default.
• W4282938004 cites W2087698390 @default.
• W4282938004 cites W2098964207 @default.
• W4282938004 cites W2112614773 @default.
• W4282938004 cites W2138739197 @default.
• W4282938004 cites W2158932701 @default.
• W4282938004 cites W2160207024 @default.
• W4282938004 cites W2161539610 @default.
• W4282938004 cites W2171137825 @default.
• W4282938004 cites W2210730212 @default.
• W4282938004 cites W2227562672 @default.
• W4282938004 cites W2314947323 @default.
• W4282938004 cites W2326313728 @default.
• W4282938004 cites W2334419800 @default.
• W4282938004 cites W2345385773 @default.
• W4282938004 cites W2378350719 @default.
• W4282938004 cites W2527995625 @default.
• W4282938004 cites W2571845469 @default.
• W4282938004 cites W2598231725 @default.
• W4282938004 cites W2604211085 @default.
• W4282938004 cites W2617175692 @default.
• W4282938004 cites W2734791465 @default.
• W4282938004 cites W2743136359 @default.
• W4282938004 cites W2759566009 @default.
• W4282938004 cites W2763666303 @default.
• W4282938004 cites W2771363614 @default.
• W4282938004 cites W2785892986 @default.
• W4282938004 cites W2792070456 @default.
• W4282938004 cites W2800162270 @default.
• W4282938004 cites W2801985588 @default.
• W4282938004 cites W2810517312 @default.
• W4282938004 cites W2887763319 @default.
• W4282938004 cites W2891055371 @default.
• W4282938004 cites W2891587422 @default.
• W4282938004 cites W2894294560 @default.
• W4282938004 cites W2905615135 @default.
• W4282938004 cites W2905721630 @default.
• W4282938004 cites W2908534055 @default.
• W4282938004 cites W2910446739 @default.
• W4282938004 cites W2911786627 @default.
• W4282938004 cites W2913951811 @default.
• W4282938004 cites W2931684697 @default.
• W4282938004 cites W2936853300 @default.
• W4282938004 cites W2943813491 @default.
• W4282938004 cites W2946222468 @default.
• W4282938004 cites W2949752379 @default.
• W4282938004 cites W2955547388 @default.
• W4282938004 cites W3022894583 @default.
• W4282938004 cites W3023812250 @default.
• W4282938004 cites W3042923735 @default.
• W4282938004 cites W3043497977 @default.
• W4282938004 cites W3096011876 @default.
• W4282938004 cites W3128416517 @default.
• W4282938004 cites W3176233721 @default.
• W4282938004 cites W3184919040 @default.
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• W4282938004 doi "https://doi.org/10.1039/d2dt01427k" @default.
• W4282938004 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/35670303" @default.
• W4282938004 hasPublicationYear "2022" @default.
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