Matches in SemOpenAlex for { <https://semopenalex.org/work/W4282946532> ?p ?o ?g. }
- W4282946532 endingPage "28336" @default.
- W4282946532 startingPage "28321" @default.
- W4282946532 abstract "Octyl hydroxamic acid (OHA) was investigated as an inhibitor in H2O2-based alkaline silica dispersions for the polishing of cobalt (Co) films for interconnect applications. A combination of experiments and density functional theory (DFT) was used to investigate the inhibition effect and the mechanism of OHA on the Co surface. On the basis of the experiments, it can be proven that OHA has an inhibition effect on Co, which came from the inhibition of the cathodic reaction. The X-ray photoelectron spectroscopy (XPS) experiments show that the adsorption of OHA weakened the oxidation of the Co surface and protected the Co surface from corrosion. On the basis of the calculations, it can be proven that the OHAketone (ion) is most likely to react with the Co surface, and it can adsorb on the Co surface by Co-O bonds. This study provides important microscopic insights for understanding the corrosion protection of Co interconnect metals and helps to explain the corrosion inhibition mechanism of the organic-metal interface during the CMP process." @default.
- W4282946532 created "2022-06-16" @default.
- W4282946532 creator A5000501608 @default.
- W4282946532 creator A5001815311 @default.
- W4282946532 creator A5018222474 @default.
- W4282946532 creator A5041616890 @default.
- W4282946532 creator A5049612435 @default.
- W4282946532 creator A5052959985 @default.
- W4282946532 creator A5080102032 @default.
- W4282946532 date "2022-06-08" @default.
- W4282946532 modified "2023-10-02" @default.
- W4282946532 title "Experimental and Computational Studies on Octyl Hydroxamic Acid as an Environmentally Friendly Inhibitor of Cobalt Chemical Mechanical Polishing" @default.
- W4282946532 cites W1515368548 @default.
- W4282946532 cites W1981090962 @default.
- W4282946532 cites W1981368803 @default.
- W4282946532 cites W1985240449 @default.
- W4282946532 cites W1986017009 @default.
- W4282946532 cites W1999012679 @default.
- W4282946532 cites W2023271753 @default.
- W4282946532 cites W2029667189 @default.
- W4282946532 cites W2030082437 @default.
- W4282946532 cites W2033210585 @default.
- W4282946532 cites W2043737771 @default.
- W4282946532 cites W2044591029 @default.
- W4282946532 cites W2047908781 @default.
- W4282946532 cites W2049109292 @default.
- W4282946532 cites W2054996255 @default.
- W4282946532 cites W2057347712 @default.
- W4282946532 cites W2072479422 @default.
- W4282946532 cites W2083059384 @default.
- W4282946532 cites W209555762 @default.
- W4282946532 cites W2096193930 @default.
- W4282946532 cites W2107392593 @default.
- W4282946532 cites W2117894566 @default.
- W4282946532 cites W2121237359 @default.
- W4282946532 cites W2123126512 @default.
- W4282946532 cites W2132525235 @default.
- W4282946532 cites W2159752439 @default.
- W4282946532 cites W2207907300 @default.
- W4282946532 cites W2300061772 @default.
- W4282946532 cites W2518933473 @default.
- W4282946532 cites W2554474142 @default.
- W4282946532 cites W2595423431 @default.
- W4282946532 cites W2620886405 @default.
- W4282946532 cites W2735614950 @default.
- W4282946532 cites W2744766191 @default.
- W4282946532 cites W2765655667 @default.
- W4282946532 cites W2796339026 @default.
- W4282946532 cites W2802127740 @default.
- W4282946532 cites W2886537642 @default.
- W4282946532 cites W2898084833 @default.
- W4282946532 cites W2917538525 @default.
- W4282946532 cites W2921747006 @default.
- W4282946532 cites W2949805662 @default.
- W4282946532 cites W2950577958 @default.
- W4282946532 cites W2955915908 @default.
- W4282946532 cites W2966729022 @default.
- W4282946532 cites W2994736979 @default.
- W4282946532 cites W3024784475 @default.
- W4282946532 cites W3036335814 @default.
- W4282946532 cites W3038890552 @default.
- W4282946532 cites W3043368085 @default.
- W4282946532 cites W3047615414 @default.
- W4282946532 cites W3083670448 @default.
- W4282946532 cites W3104165943 @default.
- W4282946532 cites W3128728215 @default.
- W4282946532 cites W3131687951 @default.
- W4282946532 cites W3136068170 @default.
- W4282946532 cites W3164341460 @default.
- W4282946532 cites W4211217388 @default.
- W4282946532 doi "https://doi.org/10.1021/acsami.2c02837" @default.
- W4282946532 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/35674496" @default.
- W4282946532 hasPublicationYear "2022" @default.
- W4282946532 type Work @default.
- W4282946532 citedByCount "7" @default.
- W4282946532 countsByYear W42829465322022 @default.
- W4282946532 countsByYear W42829465322023 @default.
- W4282946532 crossrefType "journal-article" @default.
- W4282946532 hasAuthorship W4282946532A5000501608 @default.
- W4282946532 hasAuthorship W4282946532A5001815311 @default.
- W4282946532 hasAuthorship W4282946532A5018222474 @default.
- W4282946532 hasAuthorship W4282946532A5041616890 @default.
- W4282946532 hasAuthorship W4282946532A5049612435 @default.
- W4282946532 hasAuthorship W4282946532A5052959985 @default.
- W4282946532 hasAuthorship W4282946532A5080102032 @default.
- W4282946532 hasConcept C115537861 @default.
- W4282946532 hasConcept C127413603 @default.
- W4282946532 hasConcept C138113353 @default.
- W4282946532 hasConcept C147789679 @default.
- W4282946532 hasConcept C150394285 @default.
- W4282946532 hasConcept C17525397 @default.
- W4282946532 hasConcept C175708663 @default.
- W4282946532 hasConcept C179104552 @default.
- W4282946532 hasConcept C180088628 @default.
- W4282946532 hasConcept C185592680 @default.
- W4282946532 hasConcept C191897082 @default.
- W4282946532 hasConcept C192562407 @default.
- W4282946532 hasConcept C20625102 @default.