Matches in SemOpenAlex for { <https://semopenalex.org/work/W4283163984> ?p ?o ?g. }
- W4283163984 endingPage "101484" @default.
- W4283163984 startingPage "101484" @default.
- W4283163984 abstract "The influence of residual stress concentrations on the mechanical stability and functional properties of vertical power transistors is not fully understood. In this work, residual stresses are analyzed in two polycrystalline Si electrodes using synchrotron X-ray nanodiffraction and finite element (FE) modeling. Diffraction scanning was performed over 42 transistors with a step size of 100 nm and the data were subsequently averaged in order to compensate for relatively poor diffraction statistics. The experiment revealed compressive in-plane and out-of-plane stresses of -185 to -225 MPa and -65 to -95 MPa, respectively, in the lower electrode and equiaxial tensile stresses of 70 to 150 MPa in the upper electrode, which appear to be dependent on doping and increase proportionally from compressive to tensile with the electrodes’ dimensions and grain size. The results are interpreted in terms of processing route and correlated with the FE simulation. The comparison shows overall good agreement for in-plane and out-of-plane residual stresses but indicates a limitation of the FE stress simulation regarding the impact of doping and grain size effects." @default.
- W4283163984 created "2022-06-21" @default.
- W4283163984 creator A5010293542 @default.
- W4283163984 creator A5011159342 @default.
- W4283163984 creator A5026907626 @default.
- W4283163984 creator A5029420054 @default.
- W4283163984 creator A5043197817 @default.
- W4283163984 creator A5044552579 @default.
- W4283163984 creator A5051482050 @default.
- W4283163984 date "2022-08-01" @default.
- W4283163984 modified "2023-10-14" @default.
- W4283163984 title "X-ray nanodiffraction analysis of residual stresses in polysilicon electrodes of vertical power transistors" @default.
- W4283163984 cites W1517564515 @default.
- W4283163984 cites W1967428644 @default.
- W4283163984 cites W1968089027 @default.
- W4283163984 cites W1977291129 @default.
- W4283163984 cites W1985187644 @default.
- W4283163984 cites W1998453954 @default.
- W4283163984 cites W2008929502 @default.
- W4283163984 cites W2009045641 @default.
- W4283163984 cites W2011042741 @default.
- W4283163984 cites W2014264149 @default.
- W4283163984 cites W2016776383 @default.
- W4283163984 cites W2022232545 @default.
- W4283163984 cites W2027088507 @default.
- W4283163984 cites W2030613443 @default.
- W4283163984 cites W2033741365 @default.
- W4283163984 cites W2036463318 @default.
- W4283163984 cites W2048513879 @default.
- W4283163984 cites W2052482176 @default.
- W4283163984 cites W2054039184 @default.
- W4283163984 cites W2056196879 @default.
- W4283163984 cites W2061278135 @default.
- W4283163984 cites W2074069591 @default.
- W4283163984 cites W2074453262 @default.
- W4283163984 cites W2088560163 @default.
- W4283163984 cites W2115295828 @default.
- W4283163984 cites W2117152322 @default.
- W4283163984 cites W2138463943 @default.
- W4283163984 cites W2144458557 @default.
- W4283163984 cites W2147522272 @default.
- W4283163984 cites W2170581012 @default.
- W4283163984 cites W2260528853 @default.
- W4283163984 cites W2292989096 @default.
- W4283163984 cites W2329208122 @default.
- W4283163984 cites W2594414033 @default.
- W4283163984 cites W2770116989 @default.
- W4283163984 cites W2917515804 @default.
- W4283163984 cites W2952428013 @default.
- W4283163984 cites W3099743732 @default.
- W4283163984 doi "https://doi.org/10.1016/j.mtla.2022.101484" @default.
- W4283163984 hasPublicationYear "2022" @default.
- W4283163984 type Work @default.
- W4283163984 citedByCount "3" @default.
- W4283163984 countsByYear W42831639842022 @default.
- W4283163984 countsByYear W42831639842023 @default.
- W4283163984 crossrefType "journal-article" @default.
- W4283163984 hasAuthorship W4283163984A5010293542 @default.
- W4283163984 hasAuthorship W4283163984A5011159342 @default.
- W4283163984 hasAuthorship W4283163984A5026907626 @default.
- W4283163984 hasAuthorship W4283163984A5029420054 @default.
- W4283163984 hasAuthorship W4283163984A5043197817 @default.
- W4283163984 hasAuthorship W4283163984A5044552579 @default.
- W4283163984 hasAuthorship W4283163984A5051482050 @default.
- W4283163984 hasBestOaLocation W42831639841 @default.
- W4283163984 hasConcept C112950240 @default.
- W4283163984 hasConcept C120665830 @default.
- W4283163984 hasConcept C121332964 @default.
- W4283163984 hasConcept C137637335 @default.
- W4283163984 hasConcept C138885662 @default.
- W4283163984 hasConcept C147789679 @default.
- W4283163984 hasConcept C159985019 @default.
- W4283163984 hasConcept C17525397 @default.
- W4283163984 hasConcept C185592680 @default.
- W4283163984 hasConcept C191897082 @default.
- W4283163984 hasConcept C192191005 @default.
- W4283163984 hasConcept C192562407 @default.
- W4283163984 hasConcept C207114421 @default.
- W4283163984 hasConcept C21036866 @default.
- W4283163984 hasConcept C21368211 @default.
- W4283163984 hasConcept C30407753 @default.
- W4283163984 hasConcept C37292000 @default.
- W4283163984 hasConcept C41895202 @default.
- W4283163984 hasConcept C49040817 @default.
- W4283163984 hasConcept C57863236 @default.
- W4283163984 hasConceptScore W4283163984C112950240 @default.
- W4283163984 hasConceptScore W4283163984C120665830 @default.
- W4283163984 hasConceptScore W4283163984C121332964 @default.
- W4283163984 hasConceptScore W4283163984C137637335 @default.
- W4283163984 hasConceptScore W4283163984C138885662 @default.
- W4283163984 hasConceptScore W4283163984C147789679 @default.
- W4283163984 hasConceptScore W4283163984C159985019 @default.
- W4283163984 hasConceptScore W4283163984C17525397 @default.
- W4283163984 hasConceptScore W4283163984C185592680 @default.
- W4283163984 hasConceptScore W4283163984C191897082 @default.
- W4283163984 hasConceptScore W4283163984C192191005 @default.
- W4283163984 hasConceptScore W4283163984C192562407 @default.
- W4283163984 hasConceptScore W4283163984C207114421 @default.