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- W4283208228 abstract "We report on the low-energy electron irradiated 4H-SiC material studied by means of deep-level transient spectroscopy (DLTS) and Laplace-DLTS. Electron irradiation has introduced the following deep level defects: EH1 and EH3 previously assigned to carbon interstitial-related defects, and M-center, a metastable defect also recently assigned to carbon interstitial defects. We propose that EH1 and EH3 are identical to M1 and M3 and assign them to C_i^(= ) (h) and C_i^(0 ) (h), respectively. Moreover, we provide direct evidence that Laplace-DLTS can be used as an excellent tool to distinguish otherwise identical DLTS signals associated with S1 (VSi) and EH1 (Ci)." @default.
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- W4283208228 date "2022-06-20" @default.
- W4283208228 modified "2023-10-14" @default.
- W4283208228 title "M-center in low-energy electron irradiated 4<i>H</i>-SiC" @default.
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- W4283208228 doi "https://doi.org/10.1063/5.0095827" @default.
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