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• W4283364488 endingPage "5965" @default.
• W4283364488 startingPage "5965" @default.
• W4283364488 abstract "Extreme ultraviolet (EUV) pellicles must have an EUV reflectance (EUVR) below 0.04% to prevent the reduction of critical dimension (CD). However, pellicle wrinkles cause localized CD variation by locally amplifying the EUVR. This study demonstrates that wrinkles can increase the pellicle's EUVR by approximately four times, and the CD drop depends on the relative position of the reflected light from the wrinkle to the 0th- or 1st-order diffracted light. The CD decreases by 6 nm. Therefore, even if the pellicle satisfies the requirement for the EUVR, we need to tightly control the generation of wrinkles to suppress CD variation during the entire exposure process." @default.
• W4283364488 created "2022-06-25" @default.
• W4283364488 creator A5000794048 @default.
• W4283364488 creator A5005572481 @default.
• W4283364488 creator A5031446434 @default.
• W4283364488 creator A5040569874 @default.
• W4283364488 date "2022-07-05" @default.
• W4283364488 modified "2023-09-26" @default.
• W4283364488 title "Effect of wrinkles on extreme ultraviolet pellicle reflectivity and local critical dimension" @default.
• W4283364488 cites W1757410470 @default.
• W4283364488 cites W1968505913 @default.
• W4283364488 cites W1969559622 @default.
• W4283364488 cites W1972822190 @default.
• W4283364488 cites W1994555854 @default.
• W4283364488 cites W2008971484 @default.
• W4283364488 cites W2019015885 @default.
• W4283364488 cites W2022072902 @default.
• W4283364488 cites W2050709101 @default.
• W4283364488 cites W2054663801 @default.
• W4283364488 cites W2057249696 @default.
• W4283364488 cites W2074558813 @default.
• W4283364488 cites W2079765181 @default.
• W4283364488 cites W2088206664 @default.
• W4283364488 cites W2091029385 @default.
• W4283364488 cites W2107535961 @default.
• W4283364488 cites W2125402047 @default.
• W4283364488 cites W2140952557 @default.
• W4283364488 cites W2149500643 @default.
• W4283364488 cites W2165161875 @default.
• W4283364488 cites W2269190238 @default.
• W4283364488 cites W2322718397 @default.
• W4283364488 cites W2493939636 @default.
• W4283364488 cites W2581395937 @default.
• W4283364488 cites W2599403765 @default.
• W4283364488 cites W2728611525 @default.
• W4283364488 cites W2766197163 @default.
• W4283364488 cites W2792402902 @default.
• W4283364488 cites W2894664314 @default.
• W4283364488 cites W2921029842 @default.
• W4283364488 cites W2954164328 @default.
• W4283364488 cites W2970734980 @default.
• W4283364488 cites W2971188796 @default.
• W4283364488 cites W2980127790 @default.
• W4283364488 cites W3014014393 @default.
• W4283364488 cites W3089181765 @default.
• W4283364488 cites W3130688937 @default.
• W4283364488 cites W3131179059 @default.
• W4283364488 doi "https://doi.org/10.1364/ao.461413" @default.
• W4283364488 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/36255836" @default.
• W4283364488 hasPublicationYear "2022" @default.
• W4283364488 type Work @default.
• W4283364488 citedByCount "3" @default.
• W4283364488 countsByYear W42833644882023 @default.
• W4283364488 crossrefType "journal-article" @default.
• W4283364488 hasAuthorship W4283364488A5000794048 @default.
• W4283364488 hasAuthorship W4283364488A5005572481 @default.
• W4283364488 hasAuthorship W4283364488A5031446434 @default.
• W4283364488 hasAuthorship W4283364488A5040569874 @default.
• W4283364488 hasConcept C108597893 @default.
• W4283364488 hasConcept C120665830 @default.
• W4283364488 hasConcept C121332964 @default.
• W4283364488 hasConcept C146024833 @default.
• W4283364488 hasConcept C162996421 @default.
• W4283364488 hasConcept C192562407 @default.
• W4283364488 hasConcept C207789793 @default.
• W4283364488 hasConcept C2776798109 @default.
• W4283364488 hasConcept C2781345722 @default.
• W4283364488 hasConcept C41008148 @default.
• W4283364488 hasConcept C49040817 @default.
• W4283364488 hasConcept C520434653 @default.
• W4283364488 hasConcept C76155785 @default.
• W4283364488 hasConceptScore W4283364488C108597893 @default.
• W4283364488 hasConceptScore W4283364488C120665830 @default.
• W4283364488 hasConceptScore W4283364488C121332964 @default.
• W4283364488 hasConceptScore W4283364488C146024833 @default.
• W4283364488 hasConceptScore W4283364488C162996421 @default.
• W4283364488 hasConceptScore W4283364488C192562407 @default.
• W4283364488 hasConceptScore W4283364488C207789793 @default.
• W4283364488 hasConceptScore W4283364488C2776798109 @default.
• W4283364488 hasConceptScore W4283364488C2781345722 @default.
• W4283364488 hasConceptScore W4283364488C41008148 @default.
• W4283364488 hasConceptScore W4283364488C49040817 @default.
• W4283364488 hasConceptScore W4283364488C520434653 @default.
• W4283364488 hasConceptScore W4283364488C76155785 @default.
• W4283364488 hasFunder F4320322120 @default.
• W4283364488 hasFunder F4320328359 @default.
• W4283364488 hasIssue "20" @default.
• W4283364488 hasLocation W42833644881 @default.
• W4283364488 hasLocation W42833644882 @default.
• W4283364488 hasOpenAccess W4283364488 @default.
• W4283364488 hasPrimaryLocation W42833644881 @default.
• W4283364488 hasRelatedWork W1673772832 @default.
• W4283364488 hasRelatedWork W1993389193 @default.
• W4283364488 hasRelatedWork W2068783232 @default.
• W4283364488 hasRelatedWork W2079792613 @default.
• W4283364488 hasRelatedWork W2095812538 @default.
• W4283364488 hasRelatedWork W2136649908 @default.
• W4283364488 hasRelatedWork W2300998316 @default.

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