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- W4283448503 abstract "The development of ways to increase the intensity of extreme ultraviolet (EUV) light sources for future EUV lithography is important to realize high throughput fine patterning. The energy-recovery linac (ERL) free-electron laser (FEL), which is an accelerator based light source, is a candidate for this. We clarify the design concept of the ERL-FEL for EUV light sources for future lithography, delivery systems of the FEL light to multiscanners, and future development items of the accelerator technologies and a possibility of the beyond EUV." @default.
- W4283448503 created "2022-06-26" @default.
- W4283448503 creator A5000398344 @default.
- W4283448503 creator A5007422276 @default.
- W4283448503 creator A5039028952 @default.
- W4283448503 creator A5046984894 @default.
- W4283448503 creator A5051247319 @default.
- W4283448503 date "2022-06-25" @default.
- W4283448503 modified "2023-10-14" @default.
- W4283448503 title "High power light source for future extreme ultraviolet lithography based on energy-recovery linac free-electron laser" @default.
- W4283448503 cites W1981977324 @default.
- W4283448503 cites W1989346916 @default.
- W4283448503 cites W2004940854 @default.
- W4283448503 cites W2006643096 @default.
- W4283448503 cites W2008416518 @default.
- W4283448503 cites W2012096071 @default.
- W4283448503 cites W2023368292 @default.
- W4283448503 cites W2026170586 @default.
- W4283448503 cites W2031786318 @default.
- W4283448503 cites W2035508805 @default.
- W4283448503 cites W2063069390 @default.
- W4283448503 cites W2078333089 @default.
- W4283448503 cites W2323120711 @default.
- W4283448503 cites W2582792916 @default.
- W4283448503 cites W2603468217 @default.
- W4283448503 cites W2738982870 @default.
- W4283448503 cites W2917938839 @default.
- W4283448503 cites W3044754872 @default.
- W4283448503 cites W3102193448 @default.
- W4283448503 cites W3161183524 @default.
- W4283448503 cites W3210464140 @default.
- W4283448503 cites W4248586994 @default.
- W4283448503 doi "https://doi.org/10.1117/1.jmm.21.2.021210" @default.
- W4283448503 hasPublicationYear "2022" @default.
- W4283448503 type Work @default.
- W4283448503 citedByCount "2" @default.
- W4283448503 countsByYear W42834485032023 @default.
- W4283448503 crossrefType "journal-article" @default.
- W4283448503 hasAuthorship W4283448503A5000398344 @default.
- W4283448503 hasAuthorship W4283448503A5007422276 @default.
- W4283448503 hasAuthorship W4283448503A5039028952 @default.
- W4283448503 hasAuthorship W4283448503A5046984894 @default.
- W4283448503 hasAuthorship W4283448503A5051247319 @default.
- W4283448503 hasBestOaLocation W42834485031 @default.
- W4283448503 hasConcept C120665830 @default.
- W4283448503 hasConcept C121332964 @default.
- W4283448503 hasConcept C146024833 @default.
- W4283448503 hasConcept C162996421 @default.
- W4283448503 hasConcept C168834538 @default.
- W4283448503 hasConcept C180048950 @default.
- W4283448503 hasConcept C204223013 @default.
- W4283448503 hasConcept C2775876984 @default.
- W4283448503 hasConcept C2982854487 @default.
- W4283448503 hasConcept C49040817 @default.
- W4283448503 hasConcept C520434653 @default.
- W4283448503 hasConceptScore W4283448503C120665830 @default.
- W4283448503 hasConceptScore W4283448503C121332964 @default.
- W4283448503 hasConceptScore W4283448503C146024833 @default.
- W4283448503 hasConceptScore W4283448503C162996421 @default.
- W4283448503 hasConceptScore W4283448503C168834538 @default.
- W4283448503 hasConceptScore W4283448503C180048950 @default.
- W4283448503 hasConceptScore W4283448503C204223013 @default.
- W4283448503 hasConceptScore W4283448503C2775876984 @default.
- W4283448503 hasConceptScore W4283448503C2982854487 @default.
- W4283448503 hasConceptScore W4283448503C49040817 @default.
- W4283448503 hasConceptScore W4283448503C520434653 @default.
- W4283448503 hasIssue "02" @default.
- W4283448503 hasLocation W42834485031 @default.
- W4283448503 hasOpenAccess W4283448503 @default.
- W4283448503 hasPrimaryLocation W42834485031 @default.
- W4283448503 hasRelatedWork W1983642608 @default.
- W4283448503 hasRelatedWork W1990897501 @default.
- W4283448503 hasRelatedWork W1994433579 @default.
- W4283448503 hasRelatedWork W1996907800 @default.
- W4283448503 hasRelatedWork W2022331525 @default.
- W4283448503 hasRelatedWork W2062208574 @default.
- W4283448503 hasRelatedWork W2136948969 @default.
- W4283448503 hasRelatedWork W3053914760 @default.
- W4283448503 hasRelatedWork W4283448503 @default.
- W4283448503 hasRelatedWork W2185435301 @default.
- W4283448503 hasVolume "21" @default.
- W4283448503 isParatext "false" @default.
- W4283448503 isRetracted "false" @default.
- W4283448503 workType "article" @default.