Matches in SemOpenAlex for { <https://semopenalex.org/work/W4283744410> ?p ?o ?g. }
- W4283744410 endingPage "128672" @default.
- W4283744410 startingPage "128672" @default.
- W4283744410 abstract "Using the CALPHAD approach to understand zirconium carbide deposition, a series of phase equilibria were calculated from a custom thermodynamic database based on a literature source, and the equilibria were used to explore the potential chemical vapor deposition (CVD) processing space in the ZrCl4-CH3SiCl3-CH4-H2 system as a function of pressure, temperature, and gas composition. Several gas ratios were considered. At a given ZrCl4:CH3SiCl3 ratio within the range studied, the most important factor was found to be the ratios of CH4:ZrCl4, wherein the nature of the composition – carbide vs. silicide – could be controlled. A pure binary composition of ZrC and SiC is expected to form by increasing the initial amount of methane and decreasing the amount of hydrogen from values predicted purely based on thermodynamic equilibrium. Rietveld analysis of the x-ray diffractograms from corresponding experimental depositions confirmed that increasing the CH4:ZrCl4 ratio increased the fraction of carbon-containing species (SiC, ZrC) and decreased the fraction of non-carbides (ZrSi, ZrSi2, etc.), as predicted from the CALPHAD results." @default.
- W4283744410 created "2022-07-02" @default.
- W4283744410 creator A5002686056 @default.
- W4283744410 creator A5030846529 @default.
- W4283744410 creator A5035805406 @default.
- W4283744410 creator A5040662101 @default.
- W4283744410 creator A5091018814 @default.
- W4283744410 date "2022-08-01" @default.
- W4283744410 modified "2023-09-27" @default.
- W4283744410 title "Leveraging computational thermodynamics to guide SiC-ZrC chemical vapor deposition process development" @default.
- W4283744410 cites W1531133185 @default.
- W4283744410 cites W1618584074 @default.
- W4283744410 cites W1657752593 @default.
- W4283744410 cites W171120399 @default.
- W4283744410 cites W177251254 @default.
- W4283744410 cites W1968205014 @default.
- W4283744410 cites W1969890688 @default.
- W4283744410 cites W1971234726 @default.
- W4283744410 cites W1975124238 @default.
- W4283744410 cites W1979723790 @default.
- W4283744410 cites W1985288729 @default.
- W4283744410 cites W1997590333 @default.
- W4283744410 cites W2003617585 @default.
- W4283744410 cites W2004766193 @default.
- W4283744410 cites W2005255809 @default.
- W4283744410 cites W2005946544 @default.
- W4283744410 cites W2012004006 @default.
- W4283744410 cites W2014504775 @default.
- W4283744410 cites W2023158649 @default.
- W4283744410 cites W2026340605 @default.
- W4283744410 cites W2030623769 @default.
- W4283744410 cites W2030829104 @default.
- W4283744410 cites W2040220059 @default.
- W4283744410 cites W2042440733 @default.
- W4283744410 cites W2043865516 @default.
- W4283744410 cites W2046920893 @default.
- W4283744410 cites W2048536171 @default.
- W4283744410 cites W2049569511 @default.
- W4283744410 cites W2053697795 @default.
- W4283744410 cites W2054393026 @default.
- W4283744410 cites W2057849849 @default.
- W4283744410 cites W2060196139 @default.
- W4283744410 cites W2061816353 @default.
- W4283744410 cites W2062183778 @default.
- W4283744410 cites W2069709184 @default.
- W4283744410 cites W2079612124 @default.
- W4283744410 cites W2102940758 @default.
- W4283744410 cites W2104095721 @default.
- W4283744410 cites W2141222594 @default.
- W4283744410 cites W2142295864 @default.
- W4283744410 cites W2150206577 @default.
- W4283744410 cites W2152985143 @default.
- W4283744410 cites W2159974069 @default.
- W4283744410 cites W2404251603 @default.
- W4283744410 cites W2413346929 @default.
- W4283744410 cites W2900301655 @default.
- W4283744410 cites W2951990005 @default.
- W4283744410 cites W2982329975 @default.
- W4283744410 cites W3015342760 @default.
- W4283744410 cites W3042450058 @default.
- W4283744410 cites W3129401513 @default.
- W4283744410 cites W3129696436 @default.
- W4283744410 cites W3171153180 @default.
- W4283744410 doi "https://doi.org/10.1016/j.surfcoat.2022.128672" @default.
- W4283744410 hasPublicationYear "2022" @default.
- W4283744410 type Work @default.
- W4283744410 citedByCount "1" @default.
- W4283744410 countsByYear W42837444102023 @default.
- W4283744410 crossrefType "journal-article" @default.
- W4283744410 hasAuthorship W4283744410A5002686056 @default.
- W4283744410 hasAuthorship W4283744410A5030846529 @default.
- W4283744410 hasAuthorship W4283744410A5035805406 @default.
- W4283744410 hasAuthorship W4283744410A5040662101 @default.
- W4283744410 hasAuthorship W4283744410A5091018814 @default.
- W4283744410 hasConcept C104779481 @default.
- W4283744410 hasConcept C107872376 @default.
- W4283744410 hasConcept C113196181 @default.
- W4283744410 hasConcept C121332964 @default.
- W4283744410 hasConcept C140205800 @default.
- W4283744410 hasConcept C149629883 @default.
- W4283744410 hasConcept C159985019 @default.
- W4283744410 hasConcept C171250308 @default.
- W4283744410 hasConcept C178790620 @default.
- W4283744410 hasConcept C185592680 @default.
- W4283744410 hasConcept C191897082 @default.
- W4283744410 hasConcept C192562407 @default.
- W4283744410 hasConcept C2778211622 @default.
- W4283744410 hasConcept C2780901251 @default.
- W4283744410 hasConcept C36591836 @default.
- W4283744410 hasConcept C44280652 @default.
- W4283744410 hasConcept C516920438 @default.
- W4283744410 hasConcept C5335593 @default.
- W4283744410 hasConcept C534791751 @default.
- W4283744410 hasConcept C544956773 @default.
- W4283744410 hasConcept C57410435 @default.
- W4283744410 hasConcept C85906118 @default.
- W4283744410 hasConcept C93501709 @default.
- W4283744410 hasConcept C97355855 @default.