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• W4284669488 abstract "Novel precursors enable the low-temperature ALD of metallic nickel thin films." @default.
• W4284669488 created "2022-07-08" @default.
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• W4284669488 date "2022-01-01" @default.
• W4284669488 modified "2023-10-16" @default.
• W4284669488 title "A low-temperature thermal ALD process for nickel utilizing dichlorobis(triethylphosphine)nickel(<scp>ii</scp>) and 1,4-bis(trimethylgermyl)-1,4-dihydropyrazine" @default.
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• W4284669488 doi "https://doi.org/10.1039/d2dt01347a" @default.
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