FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4284698462> ?p ?o ?g. }

• W4284698462 endingPage "012026" @default.
• W4284698462 startingPage "012026" @default.
• W4284698462 abstract "Abstract Deposition of boron-containing coatings is determined by their promising use for surface modification goals. In this work, we consider the equipment for the implementation of two plasma methods for the deposition of thin films of pure boron on the surface. These are a magnetron sputtering with a crystalline boron target heated in the discharge, and a system of an evaporation of pure boron target by an electron beam generated using forevacuum plasma source. The features of functioning, and operating parameters of these devices are presented. The deposition rate of boron coatings on the samples was about 20 nm/min for magnetron sputtering. The boron film deposition rate was significantly higher and reached 1 µm / min." @default.
• W4284698462 created "2022-07-08" @default.
• W4284698462 creator A5045001956 @default.
• W4284698462 creator A5055229721 @default.
• W4284698462 creator A5063253875 @default.
• W4284698462 creator A5069199394 @default.
• W4284698462 creator A5079358646 @default.
• W4284698462 creator A5082888201 @default.
• W4284698462 creator A5087266310 @default.
• W4284698462 date "2022-07-01" @default.
• W4284698462 modified "2023-10-14" @default.
• W4284698462 title "Magnetron sputtering and electron beam evaporation systems for pure boron thin film coatings" @default.
• W4284698462 cites W1799639282 @default.
• W4284698462 cites W1994839128 @default.
• W4284698462 cites W2022622748 @default.
• W4284698462 cites W2023488084 @default.
• W4284698462 cites W2044428656 @default.
• W4284698462 cites W2059049006 @default.
• W4284698462 cites W2082491469 @default.
• W4284698462 cites W2091768656 @default.
• W4284698462 cites W2098917946 @default.
• W4284698462 cites W2134977446 @default.
• W4284698462 cites W2157763904 @default.
• W4284698462 cites W2205167027 @default.
• W4284698462 cites W2206837932 @default.
• W4284698462 cites W2563272695 @default.
• W4284698462 cites W2588007910 @default.
• W4284698462 cites W2588958887 @default.
• W4284698462 cites W2606828397 @default.
• W4284698462 cites W2904362460 @default.
• W4284698462 cites W3148579740 @default.
• W4284698462 doi "https://doi.org/10.1088/1742-6596/2291/1/012026" @default.
• W4284698462 hasPublicationYear "2022" @default.
• W4284698462 type Work @default.
• W4284698462 citedByCount "0" @default.
• W4284698462 crossrefType "journal-article" @default.
• W4284698462 hasAuthorship W4284698462A5045001956 @default.
• W4284698462 hasAuthorship W4284698462A5055229721 @default.
• W4284698462 hasAuthorship W4284698462A5063253875 @default.
• W4284698462 hasAuthorship W4284698462A5069199394 @default.
• W4284698462 hasAuthorship W4284698462A5079358646 @default.
• W4284698462 hasAuthorship W4284698462A5082888201 @default.
• W4284698462 hasAuthorship W4284698462A5087266310 @default.
• W4284698462 hasBestOaLocation W42846984621 @default.
• W4284698462 hasConcept C113196181 @default.
• W4284698462 hasConcept C121332964 @default.
• W4284698462 hasConcept C123408415 @default.
• W4284698462 hasConcept C147120987 @default.
• W4284698462 hasConcept C151730666 @default.
• W4284698462 hasConcept C171250308 @default.
• W4284698462 hasConcept C178790620 @default.
• W4284698462 hasConcept C185592680 @default.
• W4284698462 hasConcept C19067145 @default.
• W4284698462 hasConcept C192562407 @default.
• W4284698462 hasConcept C22423302 @default.
• W4284698462 hasConcept C2816523 @default.
• W4284698462 hasConcept C43617362 @default.
• W4284698462 hasConcept C501308230 @default.
• W4284698462 hasConcept C61427134 @default.
• W4284698462 hasConcept C61441594 @default.
• W4284698462 hasConcept C62520636 @default.
• W4284698462 hasConcept C64297162 @default.
• W4284698462 hasConcept C7770020 @default.
• W4284698462 hasConcept C82706917 @default.
• W4284698462 hasConcept C86803240 @default.
• W4284698462 hasConcept C95312477 @default.
• W4284698462 hasConcept C97355855 @default.
• W4284698462 hasConceptScore W4284698462C113196181 @default.
• W4284698462 hasConceptScore W4284698462C121332964 @default.
• W4284698462 hasConceptScore W4284698462C123408415 @default.
• W4284698462 hasConceptScore W4284698462C147120987 @default.
• W4284698462 hasConceptScore W4284698462C151730666 @default.
• W4284698462 hasConceptScore W4284698462C171250308 @default.
• W4284698462 hasConceptScore W4284698462C178790620 @default.
• W4284698462 hasConceptScore W4284698462C185592680 @default.
• W4284698462 hasConceptScore W4284698462C19067145 @default.
• W4284698462 hasConceptScore W4284698462C192562407 @default.
• W4284698462 hasConceptScore W4284698462C22423302 @default.
• W4284698462 hasConceptScore W4284698462C2816523 @default.
• W4284698462 hasConceptScore W4284698462C43617362 @default.
• W4284698462 hasConceptScore W4284698462C501308230 @default.
• W4284698462 hasConceptScore W4284698462C61427134 @default.
• W4284698462 hasConceptScore W4284698462C61441594 @default.
• W4284698462 hasConceptScore W4284698462C62520636 @default.
• W4284698462 hasConceptScore W4284698462C64297162 @default.
• W4284698462 hasConceptScore W4284698462C7770020 @default.
• W4284698462 hasConceptScore W4284698462C82706917 @default.
• W4284698462 hasConceptScore W4284698462C86803240 @default.
• W4284698462 hasConceptScore W4284698462C95312477 @default.
• W4284698462 hasConceptScore W4284698462C97355855 @default.
• W4284698462 hasIssue "1" @default.
• W4284698462 hasLocation W42846984621 @default.
• W4284698462 hasOpenAccess W4284698462 @default.
• W4284698462 hasPrimaryLocation W42846984621 @default.
• W4284698462 hasRelatedWork W1537274052 @default.
• W4284698462 hasRelatedWork W1968373997 @default.
• W4284698462 hasRelatedWork W2019423004 @default.
• W4284698462 hasRelatedWork W2035813632 @default.

• next