Matches in SemOpenAlex for { <https://semopenalex.org/work/W4285103216> ?p ?o ?g. }
Showing items 1 to 79 of
79
with 100 items per page.
- W4285103216 abstract "In this study, we investigated the impact of the molecular weight of the base polymers of negative-tone photosensitive dielectric materials (PSDMs) for fine pitch redistribution layers (RDLs) on the swelling and resulting pattern profile.We prepared two PSDMs: samples A and B, with different molecular weights of the base polymer. We monitored swelling during development using a quartz crystal microbalance (QCM), and observed that the samples exhibited significantly different swelling behaviors. It has been suggested that controlling the molecular weight of the base polymer is important for preventing swelling and achieving fine patterning. We controlled the molecular weight of the base polymer and realized 0.8-μm line/space (L/S) patterning with an aspect ratio of 3.8 formed using an i-line stepper with 0.5 numerical aperture (NA). In addition, we show that the PSDM has insulation reliability." @default.
- W4285103216 created "2022-07-14" @default.
- W4285103216 creator A5010299692 @default.
- W4285103216 creator A5024098327 @default.
- W4285103216 creator A5060374558 @default.
- W4285103216 creator A5085379836 @default.
- W4285103216 creator A5091843225 @default.
- W4285103216 date "2022-05-01" @default.
- W4285103216 modified "2023-10-04" @default.
- W4285103216 title "Swelling Analysis of Negative-tone Photosensitive Dielectric Materials for Fine Pitch Redistribution Layers" @default.
- W4285103216 cites W1566629850 @default.
- W4285103216 cites W2006036517 @default.
- W4285103216 cites W2047525974 @default.
- W4285103216 cites W2058524532 @default.
- W4285103216 cites W2064750242 @default.
- W4285103216 cites W2068137687 @default.
- W4285103216 cites W2081831458 @default.
- W4285103216 cites W2092400991 @default.
- W4285103216 cites W2509143622 @default.
- W4285103216 cites W2885427323 @default.
- W4285103216 cites W2970490209 @default.
- W4285103216 cites W2970509073 @default.
- W4285103216 cites W2970737924 @default.
- W4285103216 cites W2985190052 @default.
- W4285103216 cites W3048156807 @default.
- W4285103216 cites W3048183719 @default.
- W4285103216 cites W3048363055 @default.
- W4285103216 cites W3161831708 @default.
- W4285103216 cites W3189273774 @default.
- W4285103216 cites W3191415913 @default.
- W4285103216 cites W3193054856 @default.
- W4285103216 cites W2802799584 @default.
- W4285103216 doi "https://doi.org/10.1109/ectc51906.2022.00314" @default.
- W4285103216 hasPublicationYear "2022" @default.
- W4285103216 type Work @default.
- W4285103216 citedByCount "1" @default.
- W4285103216 countsByYear W42851032162023 @default.
- W4285103216 crossrefType "proceedings-article" @default.
- W4285103216 hasAuthorship W4285103216A5010299692 @default.
- W4285103216 hasAuthorship W4285103216A5024098327 @default.
- W4285103216 hasAuthorship W4285103216A5060374558 @default.
- W4285103216 hasAuthorship W4285103216A5085379836 @default.
- W4285103216 hasAuthorship W4285103216A5091843225 @default.
- W4285103216 hasConcept C133386390 @default.
- W4285103216 hasConcept C150394285 @default.
- W4285103216 hasConcept C159985019 @default.
- W4285103216 hasConcept C178790620 @default.
- W4285103216 hasConcept C185592680 @default.
- W4285103216 hasConcept C192562407 @default.
- W4285103216 hasConcept C2778540859 @default.
- W4285103216 hasConcept C49040817 @default.
- W4285103216 hasConcept C521977710 @default.
- W4285103216 hasConcept C9996572 @default.
- W4285103216 hasConceptScore W4285103216C133386390 @default.
- W4285103216 hasConceptScore W4285103216C150394285 @default.
- W4285103216 hasConceptScore W4285103216C159985019 @default.
- W4285103216 hasConceptScore W4285103216C178790620 @default.
- W4285103216 hasConceptScore W4285103216C185592680 @default.
- W4285103216 hasConceptScore W4285103216C192562407 @default.
- W4285103216 hasConceptScore W4285103216C2778540859 @default.
- W4285103216 hasConceptScore W4285103216C49040817 @default.
- W4285103216 hasConceptScore W4285103216C521977710 @default.
- W4285103216 hasConceptScore W4285103216C9996572 @default.
- W4285103216 hasLocation W42851032161 @default.
- W4285103216 hasOpenAccess W4285103216 @default.
- W4285103216 hasPrimaryLocation W42851032161 @default.
- W4285103216 hasRelatedWork W1994753809 @default.
- W4285103216 hasRelatedWork W2043673973 @default.
- W4285103216 hasRelatedWork W2082293200 @default.
- W4285103216 hasRelatedWork W2137307547 @default.
- W4285103216 hasRelatedWork W2380293314 @default.
- W4285103216 hasRelatedWork W2943188944 @default.
- W4285103216 hasRelatedWork W2947213959 @default.
- W4285103216 hasRelatedWork W3008690834 @default.
- W4285103216 hasRelatedWork W3082440218 @default.
- W4285103216 hasRelatedWork W4285802202 @default.
- W4285103216 isParatext "false" @default.
- W4285103216 isRetracted "false" @default.
- W4285103216 workType "article" @default.