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- W4285103354 abstract "We report a 3-layer stacking technology with pixel-wise interconnections suitable for image sensors. Au/SiO <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</inf> hybrid bonding of silicon-on-insulator wafers allows face-to-back as well as face-to-face bonding for multilayer stacking with pixel-wise interconnections. Thin Si layer is introduced as a bonding medium to enhance bonding strength. We have developed 3-layer stacked wafers without delamination thanks to adhesive thin Si layers with 3-layered pixel-parallel image sensors aligned at accuracy of 1 μm or better." @default.
- W4285103354 created "2022-07-14" @default.
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- W4285103354 date "2022-05-01" @default.
- W4285103354 modified "2023-10-02" @default.
- W4285103354 title "3-Layer Stacking Technology with Pixel-Wise Interconnections for Image Sensors Using Hybrid Bonding of Silicon-on-Insulator Wafers Mediated by Thin Si Layers" @default.
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- W4285103354 doi "https://doi.org/10.1109/ectc51906.2022.00029" @default.
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