Matches in SemOpenAlex for { <https://semopenalex.org/work/W4285212644> ?p ?o ?g. }
- W4285212644 endingPage "523" @default.
- W4285212644 startingPage "500" @default.
- W4285212644 abstract "Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus, band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities, especially because it retains most of its properties and versatility in the thin-film form. This review focuses on applications where the CMOS integration of AlN MEMS has been effectively demonstrated. First, the fundamental concepts of piezoelectricity on polycrystalline <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$c$ </tex-math></inline-formula> -axis oriented thin-films are introduced and AlN is compared to other common piezoelectric materials, namely LiNbO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> , LiTaO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> , quartz, lead zirconate titanate (PZT), ZnO and GaN by thoroughly discussing the material properties, processing and technological implications. After presenting the possible MEMS-CMOS integration strategies, recent demonstrations of AlN-based devices are reviewed, namely energy harvesters, film bulk acoustic resonators (FBAR), contour mode resonators (CMR), gas sensors, imagers, microphones, transducers for chip-scale communication and calorimetric sensors. Finally, other recent applications/integration opportunities are outlined for AlN-based micro-mirrors, flexible sensors and transducers for liquid media and harsh environments. [2022-0006]" @default.
- W4285212644 created "2022-07-14" @default.
- W4285212644 creator A5016997805 @default.
- W4285212644 creator A5035929343 @default.
- W4285212644 creator A5062566565 @default.
- W4285212644 creator A5067370289 @default.
- W4285212644 creator A5085459469 @default.
- W4285212644 date "2022-08-01" @default.
- W4285212644 modified "2023-10-07" @default.
- W4285212644 title "CMOS-Integrated Aluminum Nitride MEMS: A Review" @default.
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