FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4285246529> ?p ?o ?g. }

• W4285246529 endingPage "3616" @default.
• W4285246529 startingPage "3611" @default.
• W4285246529 abstract "The effective work function (EWF) of WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>y</sub> on SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> /Si stacks can be modulated from 4.3 to 4.8 eV by plasma-enhanced atomic layer deposition. At higher annealing temperature, more oxidation of WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>y</sub> near SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> can yield larger dipole with the direction from thin interfacial WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>y</sub> :O to bulk WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>y</sub> , and thus EWF increases. WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.12</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.23</sub> with lower nitrogen content captures more oxygen atoms in the interfacial WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>y</sub> from SiO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> than WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.39</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.1</sub> and yields larger work function. Using different thicknesses of top WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.12</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.23</sub> and bottom WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.39</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.1</sub> with constant total thickness, the EWF can be tuned by dipole strength at WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.39</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.1</sub> /WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>y</sub> :O interface. The dipole-controlled WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>y</sub> work function metal is integrated on the stacked GeSn nanosheets (NSs) to achieve multi- <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${V}_{T}$ </tex-math></inline-formula> modulation. <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${V}_{T}$ </tex-math></inline-formula> for stacked Ge <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.87</sub> Sn <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.13</sub> NSs is increasingly negative with increasing WN <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.39</sub> C <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>0.1</sub> thickness with a wide <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>${V}_{T}$ </tex-math></inline-formula> tunability of 510 mV." @default.
• W4285246529 created "2022-07-14" @default.
• W4285246529 creator A5037346513 @default.
• W4285246529 creator A5038622124 @default.
• W4285246529 creator A5040326429 @default.
• W4285246529 creator A5043292560 @default.
• W4285246529 creator A5049569903 @default.
• W4285246529 creator A5057943079 @default.
• W4285246529 creator A5077941048 @default.
• W4285246529 creator A5089994249 @default.
• W4285246529 date "2022-07-01" @default.
• W4285246529 modified "2023-10-16" @default.
• W4285246529 title "Multi-<i>V_T </i> of Stacked GeSn Nanosheets by ALD WN_xC_y Work Function Metal" @default.
• W4285246529 cites W1672127102 @default.
• W4285246529 cites W1975768646 @default.
• W4285246529 cites W2023609981 @default.
• W4285246529 cites W2024788433 @default.
• W4285246529 cites W2043695984 @default.
• W4285246529 cites W2072845507 @default.
• W4285246529 cites W2083296632 @default.
• W4285246529 cites W2137417477 @default.
• W4285246529 cites W2155173480 @default.
• W4285246529 cites W2326720525 @default.
• W4285246529 cites W2336241111 @default.
• W4285246529 cites W2410009447 @default.
• W4285246529 cites W2569265337 @default.
• W4285246529 cites W2609354064 @default.
• W4285246529 cites W2911440198 @default.
• W4285246529 cites W2912019397 @default.
• W4285246529 cites W2913596336 @default.
• W4285246529 cites W2953153994 @default.
• W4285246529 cites W3005848250 @default.
• W4285246529 cites W3006356123 @default.
• W4285246529 cites W3107795836 @default.
• W4285246529 cites W3107933343 @default.
• W4285246529 cites W3108989253 @default.
• W4285246529 doi "https://doi.org/10.1109/ted.2022.3177386" @default.
• W4285246529 hasPublicationYear "2022" @default.
• W4285246529 type Work @default.
• W4285246529 citedByCount "0" @default.
• W4285246529 crossrefType "journal-article" @default.
• W4285246529 hasAuthorship W4285246529A5037346513 @default.
• W4285246529 hasAuthorship W4285246529A5038622124 @default.
• W4285246529 hasAuthorship W4285246529A5040326429 @default.
• W4285246529 hasAuthorship W4285246529A5043292560 @default.
• W4285246529 hasAuthorship W4285246529A5049569903 @default.
• W4285246529 hasAuthorship W4285246529A5057943079 @default.
• W4285246529 hasAuthorship W4285246529A5077941048 @default.
• W4285246529 hasAuthorship W4285246529A5089994249 @default.
• W4285246529 hasConcept C121332964 @default.
• W4285246529 hasConcept C185592680 @default.
• W4285246529 hasConcept C71240020 @default.
• W4285246529 hasConceptScore W4285246529C121332964 @default.
• W4285246529 hasConceptScore W4285246529C185592680 @default.
• W4285246529 hasConceptScore W4285246529C71240020 @default.
• W4285246529 hasFunder F4320321408 @default.
• W4285246529 hasFunder F4320322795 @default.
• W4285246529 hasIssue "7" @default.
• W4285246529 hasLocation W42852465291 @default.
• W4285246529 hasOpenAccess W4285246529 @default.
• W4285246529 hasPrimaryLocation W42852465291 @default.
• W4285246529 hasRelatedWork W1536502753 @default.
• W4285246529 hasRelatedWork W2902782467 @default.
• W4285246529 hasRelatedWork W2935759653 @default.
• W4285246529 hasRelatedWork W3105167352 @default.
• W4285246529 hasRelatedWork W3148032049 @default.
• W4285246529 hasRelatedWork W54078636 @default.
• W4285246529 hasRelatedWork W1501425562 @default.
• W4285246529 hasRelatedWork W2298861036 @default.
• W4285246529 hasRelatedWork W2954470139 @default.
• W4285246529 hasRelatedWork W3084825885 @default.
• W4285246529 hasVolume "69" @default.
• W4285246529 isParatext "false" @default.
• W4285246529 isRetracted "false" @default.
• W4285246529 workType "article" @default.