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- W4285498545 abstract "Nondestructive machining of optical components and smoothing of surface/subsurface damage generated by pre-processing is a major challenge for ultra-tight machining. The study analyzes the crack change during smoothing by quantitative layer-by-layer removal of Vickers indentations through atmosphere pressure plasma jet; the indentation change process is modeled and analyzed using Level Set Method (LSM) simulation. The results show that plasma jet processing can smooth the subsurface damage of fused silica optical components, and the LSM simulation verifies that the processing of cracks in fused silica components by plasma jet is dominated by each isotropic etching, and there are also each anisotropic etching during the change of cracks; and the depth of adjacent cracks can be judged by the moving direction of adjacent crack boundaries." @default.
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- W4285498545 date "2022-11-01" @default.
- W4285498545 modified "2023-10-11" @default.
- W4285498545 title "Morphology evolution of Vickers indentation in fused silica glass etched by atmospheric pressure plasma jet" @default.
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- W4285498545 doi "https://doi.org/10.1016/j.ceramint.2022.07.069" @default.
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