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- W4285582020 abstract "Suspended micro/nano-structures are the essential building blocks for a variety of micro/nano electromechanical (N/MEMS) applications. Owing to process variability these suspended blocks comprised significant residual-stress/stress-gradient during the fabrication, resulting in curled actuator profile that directly affects the actuation-gap (<tex>$G$</tex>). The electrostatic switching devices are highly sensitive to gap variations (as pull-in voltage, <tex>$V_{pi}^{2}propto G^{3}$</tex>). The present method and the results of its experimental investigation provide a compatible process for realizing invariant actuation air-gap using effective bending control essential requirement for electrostatic devices. We report a laser-driven scheme for stress reduction in the cantilever-based molybdenum micro-actuators without using any high-temperature process, like rapid thermal annealing (RTA). Finally, this method helps to realize freestanding micro/nano-actuators for various M/NEM devices (e.g. resonators, sensors and actuators) and can be used to reduce stress in back end of line (BEOL) technology." @default.
- W4285582020 created "2022-07-16" @default.
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- W4285582020 date "2020-11-26" @default.
- W4285582020 modified "2023-09-27" @default.
- W4285582020 title "Fabrication of Freestanding Metallic MEMS Actuator for Minimal Stress-Induced Air-gap Variations" @default.
- W4285582020 doi "https://doi.org/10.1109/icee50728.2020.9776983" @default.
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