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- W4286508385 abstract "We present a THz phase shifter with electrostatic actuators modifying the dimensions of a slot waveguide. The slot waveguide is held by mechanical metamaterials whose structural characteristics are much smaller than the wavelength to prevent a reduction of the field confinement. CST Microwave Studio simulations show that the variation of the slot width changes the phase of the feeding wave achieving a phase shift of more than 360 degree at 300 GHz. We show how to combine a slot waveguide demanding high resistive silicon with electrostatic actuators requiring p-doped silicon by using a special SOI design and fabrication process. During electromechanical characterization of the slot waveguide the actuators successfully alter the slot voltage-dependently in the range between 46.4 µm and 182.4 µm using up to 70 V." @default.
- W4286508385 created "2022-07-22" @default.
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- W4286508385 date "2022-07-04" @default.
- W4286508385 modified "2023-09-30" @default.
- W4286508385 title "THz Phase Shifter based on MEMS-actuated Slot Waveguides" @default.
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- W4286508385 doi "https://doi.org/10.1109/iwmts54901.2022.9832456" @default.
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