Matches in SemOpenAlex for { <https://semopenalex.org/work/W4286571833> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W4286571833 abstract "To solve the mobility balance issue in nanosheet FETs (NSFETs) and complementary FETs (CFETs), the aggressive approach using hetero-oriented integration with Ge channels was demonstrated by low temperature hetero-layer bonding technology (LT-HBT). Good manufacturability of the hetero-oriented Ge platform was verified with XRD 2θ-ω scan, Raman spectra, Selected Area Diffraction (SAD), and Converged Beam Electron Diffraction (CBED). Balanced device performance in terms of C-V, I <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>D</inf> -V <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>G</inf> , I <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>D</inf> -V <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>D</inf> and ρ <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>c</inf> for Ge (111) nFET and Ge (100) pFET was achieved, leading to better VTCs and voltage gains." @default.
- W4286571833 created "2022-07-22" @default.
- W4286571833 creator A5002098370 @default.
- W4286571833 creator A5002972768 @default.
- W4286571833 creator A5003091524 @default.
- W4286571833 creator A5004141295 @default.
- W4286571833 creator A5007603497 @default.
- W4286571833 creator A5014936927 @default.
- W4286571833 creator A5015332357 @default.
- W4286571833 creator A5024386538 @default.
- W4286571833 creator A5028817805 @default.
- W4286571833 creator A5034893655 @default.
- W4286571833 creator A5037739799 @default.
- W4286571833 creator A5038947493 @default.
- W4286571833 creator A5040404329 @default.
- W4286571833 creator A5041222156 @default.
- W4286571833 creator A5044871473 @default.
- W4286571833 creator A5045184588 @default.
- W4286571833 creator A5047262508 @default.
- W4286571833 creator A5052208885 @default.
- W4286571833 creator A5054400789 @default.
- W4286571833 creator A5054823772 @default.
- W4286571833 creator A5055256880 @default.
- W4286571833 creator A5088268629 @default.
- W4286571833 creator A5091292002 @default.
- W4286571833 date "2022-06-12" @default.
- W4286571833 modified "2023-10-18" @default.
- W4286571833 title "First Demonstration of Vertical Stacked Hetero-Oriented n-Ge (111)/p-Ge (100) CFET toward Mobility Balance Engineering" @default.
- W4286571833 doi "https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830316" @default.
- W4286571833 hasPublicationYear "2022" @default.
- W4286571833 type Work @default.
- W4286571833 citedByCount "0" @default.
- W4286571833 crossrefType "proceedings-article" @default.
- W4286571833 hasAuthorship W4286571833A5002098370 @default.
- W4286571833 hasAuthorship W4286571833A5002972768 @default.
- W4286571833 hasAuthorship W4286571833A5003091524 @default.
- W4286571833 hasAuthorship W4286571833A5004141295 @default.
- W4286571833 hasAuthorship W4286571833A5007603497 @default.
- W4286571833 hasAuthorship W4286571833A5014936927 @default.
- W4286571833 hasAuthorship W4286571833A5015332357 @default.
- W4286571833 hasAuthorship W4286571833A5024386538 @default.
- W4286571833 hasAuthorship W4286571833A5028817805 @default.
- W4286571833 hasAuthorship W4286571833A5034893655 @default.
- W4286571833 hasAuthorship W4286571833A5037739799 @default.
- W4286571833 hasAuthorship W4286571833A5038947493 @default.
- W4286571833 hasAuthorship W4286571833A5040404329 @default.
- W4286571833 hasAuthorship W4286571833A5041222156 @default.
- W4286571833 hasAuthorship W4286571833A5044871473 @default.
- W4286571833 hasAuthorship W4286571833A5045184588 @default.
- W4286571833 hasAuthorship W4286571833A5047262508 @default.
- W4286571833 hasAuthorship W4286571833A5052208885 @default.
- W4286571833 hasAuthorship W4286571833A5054400789 @default.
- W4286571833 hasAuthorship W4286571833A5054823772 @default.
- W4286571833 hasAuthorship W4286571833A5055256880 @default.
- W4286571833 hasAuthorship W4286571833A5088268629 @default.
- W4286571833 hasAuthorship W4286571833A5091292002 @default.
- W4286571833 hasConcept C119599485 @default.
- W4286571833 hasConcept C127413603 @default.
- W4286571833 hasConcept C184720557 @default.
- W4286571833 hasConcept C185592680 @default.
- W4286571833 hasConcept C192562407 @default.
- W4286571833 hasConcept C41008148 @default.
- W4286571833 hasConcept C62064638 @default.
- W4286571833 hasConcept C8010536 @default.
- W4286571833 hasConceptScore W4286571833C119599485 @default.
- W4286571833 hasConceptScore W4286571833C127413603 @default.
- W4286571833 hasConceptScore W4286571833C184720557 @default.
- W4286571833 hasConceptScore W4286571833C185592680 @default.
- W4286571833 hasConceptScore W4286571833C192562407 @default.
- W4286571833 hasConceptScore W4286571833C41008148 @default.
- W4286571833 hasConceptScore W4286571833C62064638 @default.
- W4286571833 hasConceptScore W4286571833C8010536 @default.
- W4286571833 hasFunder F4320309618 @default.
- W4286571833 hasLocation W42865718331 @default.
- W4286571833 hasOpenAccess W4286571833 @default.
- W4286571833 hasPrimaryLocation W42865718331 @default.
- W4286571833 hasRelatedWork W1556920843 @default.
- W4286571833 hasRelatedWork W2051245699 @default.
- W4286571833 hasRelatedWork W2086293700 @default.
- W4286571833 hasRelatedWork W2109789383 @default.
- W4286571833 hasRelatedWork W2301571230 @default.
- W4286571833 hasRelatedWork W2607642641 @default.
- W4286571833 hasRelatedWork W2614801095 @default.
- W4286571833 hasRelatedWork W2899084033 @default.
- W4286571833 hasRelatedWork W2989813378 @default.
- W4286571833 hasRelatedWork W3207038499 @default.
- W4286571833 isParatext "false" @default.
- W4286571833 isRetracted "false" @default.
- W4286571833 workType "article" @default.