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• W4286571861 abstract "For the first time, a novel Si-waveguide-integrated InGaAs/InAlAs avalanche photodiode (APD) on the SOI platform was realized, in which light propagating along the Si waveguide is evanescently absorbed by an overlaying InGaAs layer bonded on it. The integrated-APD exhibits a high responsivity of 0.99 A/W at 1570 nm, a dark current (I <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>dark</inf> ) of 7.6 nA at 90% breakdown voltage (V <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>br</inf> ), and a maximum gain of larger than 70. The good quality of the bonded III-V epi-layers and promising performance of the fabricated waveguide-integrated APDs has been realized where the negligible variation induced by the bonding process has been confirmed." @default.
• W4286571861 created "2022-07-22" @default.
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• W4286571861 date "2022-06-12" @default.
• W4286571861 modified "2023-10-18" @default.
• W4286571861 title "First Si-Waveguide-Integrated InGaAs/InAlAs Avalanche Photodiodes on SOI Platform" @default.
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• W4286571861 doi "https://doi.org/10.1109/vlsitechnologyandcir46769.2022.9830481" @default.
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