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- W4288725098 abstract "The investigations of the reactive magnetron depositing of the stoichiometric coatings metal-metalloid were done. The dependences between sputtering parameters of a target and processes of plasmochemical formation on the surface of sample metal-metalloid and formations of coatings of the appropriate structure were investigated. Experimental data on stoichiometric coatings AlN, Al2O3, TiN, TiO2 is given. Features of reactive magnetron deposition and investigation results for obtaining of coatings with pregiven properties in particular for providing stability and controllability of coating deposition processes in time. Keywords: reactive magnetron sputtering, coatings, oxide, nitride compositions." @default.
- W4288725098 created "2022-07-30" @default.
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- W4288725098 date "2022-07-27" @default.
- W4288725098 modified "2023-09-27" @default.
- W4288725098 title "Deposition of the stoichiometric coatings by reactive magnetron sputtering" @default.
- W4288725098 doi "https://doi.org/10.48550/arxiv.2207.13323" @default.
- W4288725098 hasPublicationYear "2022" @default.
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