FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4289170228> ?p ?o ?g. }

• W4289170228 abstract "This paper presents the direct growth of vertical graphene (VG) using a metal shield (MS)-assisted plasma-enhanced chemical vapor deposition (PECVD) method. The 300 [Formula: see text] Ar/CH 4 plasma is used to grow VG at 600 ∘ C for 30 min on a 200 mm Si wafer. Without MS, the high Ar + physical and H + chemical rate etching of plasma prevents the growth of VG. The installation of 1 MS helps reduce the etching by reducing the ions density in the lower plasma zone and allows localized growth of VG as dark spots on the Si wafer. The crystal quality of VG grown by Ar/CH 4 plasma with 1 MS is satisfyingly good with a narrow Raman I(G) peak within 36–40 cm −1 , and the thickness of individual VG leaf is few-layer graphene since I(2D)[Formula: see text](G) is [Formula: see text]. The installation of 2 MS further improves the coverage, size, and population density of VG on the Si wafer by further lowering the ions density in the lower plasma zone. Further annealing of VG at 1040 ∘ C in an Ar/H 2 /CH 4 environment can repair the carbon sp 2 but it is almost not required as the hydrogen atoms can etch the VG and reduce its coverage on a 200 mm Si wafer." @default.
• W4289170228 created "2022-08-01" @default.
• W4289170228 creator A5019719424 @default.
• W4289170228 creator A5029894590 @default.
• W4289170228 creator A5054750798 @default.
• W4289170228 creator A5064797227 @default.
• W4289170228 creator A5080022651 @default.
• W4289170228 date "2022-08-01" @default.
• W4289170228 modified "2023-09-26" @default.
• W4289170228 title "Modulated Ar/CH₄ Plasma by Metal Shield for Enhancing the PECVD Growth of Vertical Graphene" @default.
• W4289170228 cites W1838191974 @default.
• W4289170228 cites W2023087360 @default.
• W4289170228 cites W2031220400 @default.
• W4289170228 cites W2040142942 @default.
• W4289170228 cites W2133846444 @default.
• W4289170228 cites W2529373045 @default.
• W4289170228 cites W2554659615 @default.
• W4289170228 cites W2604871373 @default.
• W4289170228 cites W2784103986 @default.
• W4289170228 cites W2796205739 @default.
• W4289170228 cites W2807509330 @default.
• W4289170228 cites W2891678041 @default.
• W4289170228 cites W2936107047 @default.
• W4289170228 cites W3009701870 @default.
• W4289170228 cites W3010922484 @default.
• W4289170228 cites W3012602395 @default.
• W4289170228 cites W3016002237 @default.
• W4289170228 cites W3042585874 @default.
• W4289170228 cites W3083422912 @default.
• W4289170228 cites W3126266381 @default.
• W4289170228 cites W3130359620 @default.
• W4289170228 cites W3131446901 @default.
• W4289170228 cites W3156886621 @default.
• W4289170228 cites W3162246155 @default.
• W4289170228 cites W3201553020 @default.
• W4289170228 cites W3203436711 @default.
• W4289170228 cites W3213115824 @default.
• W4289170228 cites W4210328382 @default.
• W4289170228 cites W4214807998 @default.
• W4289170228 doi "https://doi.org/10.1142/s0219581x22500235" @default.
• W4289170228 hasPublicationYear "2022" @default.
• W4289170228 type Work @default.
• W4289170228 citedByCount "1" @default.
• W4289170228 countsByYear W42891702282022 @default.
• W4289170228 crossrefType "journal-article" @default.
• W4289170228 hasAuthorship W4289170228A5019719424 @default.
• W4289170228 hasAuthorship W4289170228A5029894590 @default.
• W4289170228 hasAuthorship W4289170228A5054750798 @default.
• W4289170228 hasAuthorship W4289170228A5064797227 @default.
• W4289170228 hasAuthorship W4289170228A5080022651 @default.
• W4289170228 hasConcept C100460472 @default.
• W4289170228 hasConcept C107187091 @default.
• W4289170228 hasConcept C113196181 @default.
• W4289170228 hasConcept C120665830 @default.
• W4289170228 hasConcept C121332964 @default.
• W4289170228 hasConcept C130472188 @default.
• W4289170228 hasConcept C145148216 @default.
• W4289170228 hasConcept C159985019 @default.
• W4289170228 hasConcept C160671074 @default.
• W4289170228 hasConcept C171250308 @default.
• W4289170228 hasConcept C178790620 @default.
• W4289170228 hasConcept C185592680 @default.
• W4289170228 hasConcept C192562407 @default.
• W4289170228 hasConcept C2777855556 @default.
• W4289170228 hasConcept C2779227376 @default.
• W4289170228 hasConcept C30080830 @default.
• W4289170228 hasConcept C38347018 @default.
• W4289170228 hasConcept C40003534 @default.
• W4289170228 hasConcept C43617362 @default.
• W4289170228 hasConcept C512968161 @default.
• W4289170228 hasConcept C57410435 @default.
• W4289170228 hasConcept C62520636 @default.
• W4289170228 hasConcept C82706917 @default.
• W4289170228 hasConceptScore W4289170228C100460472 @default.
• W4289170228 hasConceptScore W4289170228C107187091 @default.
• W4289170228 hasConceptScore W4289170228C113196181 @default.
• W4289170228 hasConceptScore W4289170228C120665830 @default.
• W4289170228 hasConceptScore W4289170228C121332964 @default.
• W4289170228 hasConceptScore W4289170228C130472188 @default.
• W4289170228 hasConceptScore W4289170228C145148216 @default.
• W4289170228 hasConceptScore W4289170228C159985019 @default.
• W4289170228 hasConceptScore W4289170228C160671074 @default.
• W4289170228 hasConceptScore W4289170228C171250308 @default.
• W4289170228 hasConceptScore W4289170228C178790620 @default.
• W4289170228 hasConceptScore W4289170228C185592680 @default.
• W4289170228 hasConceptScore W4289170228C192562407 @default.
• W4289170228 hasConceptScore W4289170228C2777855556 @default.
• W4289170228 hasConceptScore W4289170228C2779227376 @default.
• W4289170228 hasConceptScore W4289170228C30080830 @default.
• W4289170228 hasConceptScore W4289170228C38347018 @default.
• W4289170228 hasConceptScore W4289170228C40003534 @default.
• W4289170228 hasConceptScore W4289170228C43617362 @default.
• W4289170228 hasConceptScore W4289170228C512968161 @default.
• W4289170228 hasConceptScore W4289170228C57410435 @default.
• W4289170228 hasConceptScore W4289170228C62520636 @default.
• W4289170228 hasConceptScore W4289170228C82706917 @default.
• W4289170228 hasIssue "04" @default.
• W4289170228 hasLocation W42891702281 @default.
• W4289170228 hasOpenAccess W4289170228 @default.
• W4289170228 hasPrimaryLocation W42891702281 @default.

• next