FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4290948799> ?p ?o ?g. }

• W4290948799 endingPage "912" @default.
• W4290948799 startingPage "907" @default.
• W4290948799 abstract "Si doped HfO2 based ferroelectric capacitors integrated into Back-End-Of-Line (BEOL) 130 nm CMOS technology were investigated in regard to critical reliability parameters for their implementation in non-volatile one-transistor one-capacitor ferroelectric random-access memory applications. The assessed reliability parameters are electric field, capacitor area, and temperature and are evaluated on single and parallel structured capacitors to understand their respective impact on wake-up, fatigue, imprint, and retention." @default.
• W4290948799 created "2022-08-13" @default.
• W4290948799 creator A5003722882 @default.
• W4290948799 creator A5003850300 @default.
• W4290948799 creator A5008120374 @default.
• W4290948799 creator A5023007303 @default.
• W4290948799 creator A5029403705 @default.
• W4290948799 creator A5036708144 @default.
• W4290948799 creator A5050302547 @default.
• W4290948799 creator A5051312800 @default.
• W4290948799 creator A5051567382 @default.
• W4290948799 creator A5055319498 @default.
• W4290948799 creator A5069215871 @default.
• W4290948799 creator A5086062540 @default.
• W4290948799 date "2022-01-01" @default.
• W4290948799 modified "2023-09-30" @default.
• W4290948799 title "BEOL Integrated Ferroelectric HfO₂-Based Capacitors for FeRAM: Extrapolation of Reliability Performance to Use Conditions" @default.
• W4290948799 cites W1628672899 @default.
• W4290948799 cites W2064841664 @default.
• W4290948799 cites W2095825059 @default.
• W4290948799 cites W2100438716 @default.
• W4290948799 cites W2131980103 @default.
• W4290948799 cites W2289589977 @default.
• W4290948799 cites W3108286499 @default.
• W4290948799 cites W3109398587 @default.
• W4290948799 cites W3109416797 @default.
• W4290948799 cites W3129987829 @default.
• W4290948799 cites W3132233544 @default.
• W4290948799 cites W3156083251 @default.
• W4290948799 cites W3185821933 @default.
• W4290948799 doi "https://doi.org/10.1109/jeds.2022.3198138" @default.
• W4290948799 hasPublicationYear "2022" @default.
• W4290948799 type Work @default.
• W4290948799 citedByCount "5" @default.
• W4290948799 countsByYear W42909487992022 @default.
• W4290948799 countsByYear W42909487992023 @default.
• W4290948799 crossrefType "journal-article" @default.
• W4290948799 hasAuthorship W4290948799A5003722882 @default.
• W4290948799 hasAuthorship W4290948799A5003850300 @default.
• W4290948799 hasAuthorship W4290948799A5008120374 @default.
• W4290948799 hasAuthorship W4290948799A5023007303 @default.
• W4290948799 hasAuthorship W4290948799A5029403705 @default.
• W4290948799 hasAuthorship W4290948799A5036708144 @default.
• W4290948799 hasAuthorship W4290948799A5050302547 @default.
• W4290948799 hasAuthorship W4290948799A5051312800 @default.
• W4290948799 hasAuthorship W4290948799A5051567382 @default.
• W4290948799 hasAuthorship W4290948799A5055319498 @default.
• W4290948799 hasAuthorship W4290948799A5069215871 @default.
• W4290948799 hasAuthorship W4290948799A5086062540 @default.
• W4290948799 hasBestOaLocation W42909487991 @default.
• W4290948799 hasConcept C119599485 @default.
• W4290948799 hasConcept C121332964 @default.
• W4290948799 hasConcept C127413603 @default.
• W4290948799 hasConcept C133386390 @default.
• W4290948799 hasConcept C161164327 @default.
• W4290948799 hasConcept C163258240 @default.
• W4290948799 hasConcept C165801399 @default.
• W4290948799 hasConcept C172385210 @default.
• W4290948799 hasConcept C177950962 @default.
• W4290948799 hasConcept C189366214 @default.
• W4290948799 hasConcept C192562407 @default.
• W4290948799 hasConcept C24326235 @default.
• W4290948799 hasConcept C2776628375 @default.
• W4290948799 hasConcept C43214815 @default.
• W4290948799 hasConcept C49040817 @default.
• W4290948799 hasConcept C52192207 @default.
• W4290948799 hasConcept C62520636 @default.
• W4290948799 hasConcept C79090758 @default.
• W4290948799 hasConceptScore W4290948799C119599485 @default.
• W4290948799 hasConceptScore W4290948799C121332964 @default.
• W4290948799 hasConceptScore W4290948799C127413603 @default.
• W4290948799 hasConceptScore W4290948799C133386390 @default.
• W4290948799 hasConceptScore W4290948799C161164327 @default.
• W4290948799 hasConceptScore W4290948799C163258240 @default.
• W4290948799 hasConceptScore W4290948799C165801399 @default.
• W4290948799 hasConceptScore W4290948799C172385210 @default.
• W4290948799 hasConceptScore W4290948799C177950962 @default.
• W4290948799 hasConceptScore W4290948799C189366214 @default.
• W4290948799 hasConceptScore W4290948799C192562407 @default.
• W4290948799 hasConceptScore W4290948799C24326235 @default.
• W4290948799 hasConceptScore W4290948799C2776628375 @default.
• W4290948799 hasConceptScore W4290948799C43214815 @default.
• W4290948799 hasConceptScore W4290948799C49040817 @default.
• W4290948799 hasConceptScore W4290948799C52192207 @default.
• W4290948799 hasConceptScore W4290948799C62520636 @default.
• W4290948799 hasConceptScore W4290948799C79090758 @default.
• W4290948799 hasFunder F4320320879 @default.
• W4290948799 hasLocation W42909487991 @default.
• W4290948799 hasOpenAccess W4290948799 @default.
• W4290948799 hasPrimaryLocation W42909487991 @default.
• W4290948799 hasRelatedWork W1485635722 @default.
• W4290948799 hasRelatedWork W1511637875 @default.
• W4290948799 hasRelatedWork W1568111433 @default.
• W4290948799 hasRelatedWork W1648452824 @default.
• W4290948799 hasRelatedWork W2039428752 @default.
• W4290948799 hasRelatedWork W2053026021 @default.
• W4290948799 hasRelatedWork W2112116135 @default.
• W4290948799 hasRelatedWork W2786225549 @default.

• next