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• W4290998537 abstract "Oxidation is critical to metal chemical mechanical polishing (CMP). In this work, the role of oxidation in the material removal of GCr15 bearing steel during CMP was thoroughly investigated. Six representative oxidizers were selected to acquire the material removal rate (MRR) data. There are three distinct MRR trends. The oxidizers can be divided into three categories based on the MRR and surface composition results. For the first, with the concentration of H2O2 or KIO3 increasing, the MRR first sharply increases, then decreases and stabilizes; For the second, as the concentration of KClO3 or NaClO increases, the MRR first increases and then levels off; For the third, with the concentration of K2S2O8 or Fe(NO3)3 increasing, the MRR almost linearly increases. According to the reaction kinetics and steady state, a fundamental MRR model considering iron oxidation and removal processes was built, and then applied to the three categories of oxidizers combined with the specific oxidation paths. The fitting results agree with the MRR data. Moreover, the key to realizing efficient removal of GCr15 steel is Fe2+ for H2O2, KIO3, KClO3 and NaClO, while Fe3O4 for K2S2O8 and Fe(NO3)3. The findings can deepen the understanding of oxidation in metal CMP." @default.
• W4290998537 created "2022-08-13" @default.
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• W4290998537 date "2022-11-01" @default.
• W4290998537 modified "2023-09-30" @default.
• W4290998537 title "Towards a deep understanding of oxidation in the material removal of GCr15 bearing steel during chemical mechanical polishing" @default.
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• W4290998537 doi "https://doi.org/10.1016/j.wear.2022.204466" @default.
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