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- W4291927183 abstract "Abstract This article discusses the basic principles of SEM-based cathodoluminescence (CL) spectroscopy and demonstrates its usefulness in process development, statistical process control, and failure analysis. The technologies where the benefits of CL spectroscopy are most evident are compound semiconductor optoelectronics and high electron mobility transistors as reflected in the application examples." @default.
- W4291927183 created "2022-08-16" @default.
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- W4291927183 date "2020-11-01" @default.
- W4291927183 modified "2023-10-06" @default.
- W4291927183 title "Advances in Cathodoluminescence: Recent Steps Toward Semiconductor Fabs and FA Labs" @default.
- W4291927183 doi "https://doi.org/10.31399/asm.edfa.2020-4.p028" @default.
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