Matches in SemOpenAlex for { <https://semopenalex.org/work/W4292517170> ?p ?o ?g. }
- W4292517170 abstract "Abstract Focused‐ion‐beam machining is a powerful process to fabricate complex nanostructures, often through a sacrificial mask that enables milling beyond the resolution limit of the ion beam. However, current understanding of this super‐resolution effect is empirical in the spatial domain and nonexistent in the temporal domain. This article reports the primary study of this fundamental tradespace of resolution and throughput. Chromia functions well as a masking material due to its smooth, uniform, and amorphous structure. An efficient method of in‐line metrology enables characterization of ion‐beam focus by scanning electron microscopy. Fabrication and characterization of complex test structures through chromia and into silica probe the response of the bilayer to a focused beam of gallium cations, demonstrating super‐resolution factors of up to 6 ± 2 and improvements to volume throughput of at least factors of 42 ± 2, with uncertainties denoting 95% coverage intervals. Tractable theory models the essential aspects of the super‐resolution effect for various nanostructures. Application of the new tradespace increases the volume throughput of machining Fresnel lenses by a factor of 75, enabling the introduction of projection standards for optical microscopy. These results enable paradigm shifts of sacrificial masking from empirical to engineering design and from prototyping to manufacturing." @default.
- W4292517170 created "2022-08-21" @default.
- W4292517170 creator A5018730331 @default.
- W4292517170 creator A5044844319 @default.
- W4292517170 creator A5047244243 @default.
- W4292517170 creator A5052111364 @default.
- W4292517170 creator A5066994126 @default.
- W4292517170 creator A5067925234 @default.
- W4292517170 creator A5077813607 @default.
- W4292517170 creator A5086957558 @default.
- W4292517170 creator A5026702180 @default.
- W4292517170 date "2022-08-21" @default.
- W4292517170 modified "2023-10-14" @default.
- W4292517170 title "Unmasking the Resolution–Throughput Tradespace of Focused‐Ion‐Beam Machining" @default.
- W4292517170 cites W1530210905 @default.
- W4292517170 cites W1790652465 @default.
- W4292517170 cites W1826153068 @default.
- W4292517170 cites W1866508186 @default.
- W4292517170 cites W1966118057 @default.
- W4292517170 cites W1977405399 @default.
- W4292517170 cites W1978679802 @default.
- W4292517170 cites W1982381330 @default.
- W4292517170 cites W1987934864 @default.
- W4292517170 cites W1988423117 @default.
- W4292517170 cites W1994102318 @default.
- W4292517170 cites W1994400781 @default.
- W4292517170 cites W1997805972 @default.
- W4292517170 cites W2003302552 @default.
- W4292517170 cites W2006208570 @default.
- W4292517170 cites W2016475578 @default.
- W4292517170 cites W2018729718 @default.
- W4292517170 cites W2022835075 @default.
- W4292517170 cites W2031233807 @default.
- W4292517170 cites W2032641384 @default.
- W4292517170 cites W2033879671 @default.
- W4292517170 cites W2034999242 @default.
- W4292517170 cites W2040262945 @default.
- W4292517170 cites W2055286693 @default.
- W4292517170 cites W2059985006 @default.
- W4292517170 cites W2060869740 @default.
- W4292517170 cites W2071279610 @default.
- W4292517170 cites W2078111388 @default.
- W4292517170 cites W2084888749 @default.
- W4292517170 cites W2090291359 @default.
- W4292517170 cites W2090318557 @default.
- W4292517170 cites W2092756369 @default.
- W4292517170 cites W2103663758 @default.
- W4292517170 cites W2107226787 @default.
- W4292517170 cites W2117694298 @default.
- W4292517170 cites W2123634595 @default.
- W4292517170 cites W2139276023 @default.
- W4292517170 cites W2140857390 @default.
- W4292517170 cites W2145731945 @default.
- W4292517170 cites W2213565211 @default.
- W4292517170 cites W2286984955 @default.
- W4292517170 cites W2303575131 @default.
- W4292517170 cites W2397312913 @default.
- W4292517170 cites W2498463479 @default.
- W4292517170 cites W2507107933 @default.
- W4292517170 cites W2526154592 @default.
- W4292517170 cites W2571906621 @default.
- W4292517170 cites W2601195320 @default.
- W4292517170 cites W2613569197 @default.
- W4292517170 cites W2617162072 @default.
- W4292517170 cites W2763233580 @default.
- W4292517170 cites W2763558910 @default.
- W4292517170 cites W2765886561 @default.
- W4292517170 cites W2768864732 @default.
- W4292517170 cites W2771320018 @default.
- W4292517170 cites W2788295898 @default.
- W4292517170 cites W2799583065 @default.
- W4292517170 cites W2898857386 @default.
- W4292517170 cites W2921703988 @default.
- W4292517170 cites W2953198311 @default.
- W4292517170 cites W2977980887 @default.
- W4292517170 cites W2987398423 @default.
- W4292517170 cites W3031851080 @default.
- W4292517170 cites W3103199518 @default.
- W4292517170 cites W3202619759 @default.
- W4292517170 cites W4243257735 @default.
- W4292517170 cites W4243656136 @default.
- W4292517170 cites W4243863038 @default.
- W4292517170 cites W4250637700 @default.
- W4292517170 doi "https://doi.org/10.1002/adfm.202111840" @default.
- W4292517170 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/36824209" @default.
- W4292517170 hasPublicationYear "2022" @default.
- W4292517170 type Work @default.
- W4292517170 citedByCount "0" @default.
- W4292517170 crossrefType "journal-article" @default.
- W4292517170 hasAuthorship W4292517170A5018730331 @default.
- W4292517170 hasAuthorship W4292517170A5026702180 @default.
- W4292517170 hasAuthorship W4292517170A5044844319 @default.
- W4292517170 hasAuthorship W4292517170A5047244243 @default.
- W4292517170 hasAuthorship W4292517170A5052111364 @default.
- W4292517170 hasAuthorship W4292517170A5066994126 @default.
- W4292517170 hasAuthorship W4292517170A5067925234 @default.
- W4292517170 hasAuthorship W4292517170A5077813607 @default.
- W4292517170 hasAuthorship W4292517170A5086957558 @default.
- W4292517170 hasBestOaLocation W42925171701 @default.
- W4292517170 hasConcept C120665830 @default.