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• W4292648761 startingPage "4397" @default.
• W4292648761 abstract "Abstract We report for the first time the direct growth of molybdenum disulfide (MoS 2 ) monolayers on nanostructured silicon-on-insulator waveguides. Our results indicate the possibility of utilizing the Chemical Vapour Deposition (CVD) on nanostructured photonic devices in a scalable process. Direct growth of 2D material on nanostructures rectifies many drawbacks of the transfer-based approaches. We show that the van der Waals material grow conformally across the curves, edges, and the silicon–SiO 2 interface of the waveguide structure. Here, the waveguide structure used as a growth substrate is complex not just in terms of its geometry but also due to the two materials (Si and SiO 2 ) involved. A transfer-free method like this yields a novel approach for functionalizing nanostructured, integrated optical architectures with an optically active direct semiconductor." @default.
• W4292648761 created "2022-08-22" @default.
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• W4292648761 date "2022-08-22" @default.
• W4292648761 modified "2023-09-26" @default.
• W4292648761 title "Direct growth of monolayer MoS₂ on nanostructured silicon waveguides" @default.
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