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• W4292702012 abstract "• A method of microstructure distribution optimization is proposed to achieve further improvement of the sensing performance. • A mathematical model was developed to quantify the microstructure distribution characteristics and predict the sensitivity. • The optimized dielectric layer was fabricated directly by ultraviolet laser without any template. • The sensor shows high sensitivity, low detection limit, and a fast response time in speech recognition and grasping tests. Flexible capacitive pressure sensors have been attracting tremendous attention due to their potential applications in many fields, such as in intelligent electronics and wearable devices. Micro-structure designing of the dielectric layer is one of the key methods of improving the sensitivity of a sensor. In this paper, a method of structure distribution optimization for the micro-cone dielectric layer of a flexible capacitive pressure sensor is proposed. A mathematical model was developed during the study to quantify the distribution characteristics of the dielectric layer and predict the sensitivity of the sensor. By optimizing the structure distribution in the dielectric layer, the sensitivity of the capacitive sensor can be improved. The test results show that a sensor with an optimal structure distribution in the dielectric layer had a high sensitivity (1.43857 kPa −1 ) in a low pressure range (0–160 Pa), a low detection limit (∼1.96 Pa), a fast response time (166 ms), and good stability for 2500 cycles. Furthermore, the sensor demonstrated high sensitivity and good dynamic response in speech recognition and grasping experimental application tests." @default.
• W4292702012 created "2022-08-23" @default.
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• W4292702012 date "2022-09-01" @default.
• W4292702012 modified "2023-09-24" @default.
• W4292702012 title "Distribution optimization of micro-cone structures in the dielectric layer of a capacitive flexible pressure sensor" @default.
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• W4292702012 doi "https://doi.org/10.1016/j.measurement.2022.111773" @default.
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