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- W4292829093 abstract "Source/drain ion implantation is the basis of CMOS devices in semiconductor manufacture. In order to ensure good device performance, ultra-shallow junction technology is considered increasingly important at nodes below 16nm. However, ultra-shallow junction is sensitive to thermal budget and temperature as device sizes continue to shrink. In this work, merits and shortcomings of ion implantation in the different stages are analyzed and compared, aiming at SiGe/SiP implant of source/drain epitaxial growth layer in FinFET. It is benefit for Rc value that avoiding implantation region suffer the impact from multi-pass anneal process in the middle of flow. Meanwhile, it can also increase the implant process window and reduce unnecessary loss for implanted epitaxial layer." @default.
- W4292829093 created "2022-08-24" @default.
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- W4292829093 date "2022-06-20" @default.
- W4292829093 modified "2023-09-27" @default.
- W4292829093 title "Study on the Optimization of Finfet Ultra-Shallow Junction Ion Implantation Process" @default.
- W4292829093 cites W1988167290 @default.
- W4292829093 doi "https://doi.org/10.1109/cstic55103.2022.9856755" @default.
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