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- W4292829122 abstract "We present preliminary results of a case study carried out by four major market players. An automated crystal scanner recorded defects in sapphire boules as they passed through consecutive production stages: raw crystals (boules) ➔ cores ➔ EPI-ready wafers. In parallel, the defectiveness was assessed by experts using manual methods. The experiment design allowed tracing individual defects through all stages. We also show how digital quality control increases wafer yield by ‘intelligent wafering’, i.e. by correctly positioning the sapphire core in a wafering system." @default.
- W4292829122 created "2022-08-24" @default.
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- W4292829122 date "2022-06-20" @default.
- W4292829122 modified "2023-09-25" @default.
- W4292829122 title "Digital Defect Traceability across Sapphire Processing: Case Study on Micro-LED Chain" @default.
- W4292829122 doi "https://doi.org/10.1109/cstic55103.2022.9856783" @default.
- W4292829122 hasPublicationYear "2022" @default.
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