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- W4292829162 abstract "FDSOIs with SiGe channel have drawn significant attention due to their advantages in uniaxial strain, higher mobility and better capability to tune threshold voltage over conventional Si channel MOSFETs. In addition, raised SiGe source and drain can boost the electrical performance of PMOS by reducing the access resistance. Fabrication of SiGe material on SiGe channel which is formed by Ge condensation method is challenging due to the different surface condition and lattice property compared to Si channel. The SiGe material are successfully grown on SiGe substrate by tuning the process parameter by selective epitaxial growth." @default.
- W4292829162 created "2022-08-24" @default.
- W4292829162 creator A5015937784 @default.
- W4292829162 date "2022-06-20" @default.
- W4292829162 modified "2023-09-27" @default.
- W4292829162 title "Sige Epitaxial Growth on Sige Substrate for Advanced FDSOI Technology" @default.
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- W4292829162 doi "https://doi.org/10.1109/cstic55103.2022.9856915" @default.
- W4292829162 hasPublicationYear "2022" @default.
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