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• W4293185937 abstract "In this paper, we proposed an ultrafast and nanoscale hot-wire flow (NHF) sensor implemented in a 0.18 µm complementary metal-oxide-semiconductor microelectromechanical system (CMOS-MEMS) technology. The nanoscale wire was released and reduced in thickness and width by an in-house developed post-CMOS fabrication process, hence the heat conduction loss is greatly suppressed, while the response time of the NHF sensor is significantly improved. Benefiting from the nano size of the hot-wire (a width of 622 nm), the NHF sensor exhibits an ultrafast response time of 30 µs (@ airflow velocity of 0 m/s), a wide flow range of 0–30 m/s, and a cut-off frequency of 21 kHz under the constant temperature (CT) mode. In addition, an equivalent circuit model (ECM) was established in PSPICE to predict the NHF sensor performance, and the theoretical simulation results were in good agreement with the experiment results." @default.
• W4293185937 created "2022-08-27" @default.
• W4293185937 creator A5045896022 @default.
• W4293185937 creator A5067617591 @default.
• W4293185937 creator A5068123569 @default.
• W4293185937 creator A5076597904 @default.
• W4293185937 date "2022-04-27" @default.
• W4293185937 modified "2023-10-14" @default.
• W4293185937 title "A Nanoscale Hot-Wire Flow Sensor Based on CMOS-MEMS Technology" @default.
• W4293185937 cites W1975631503 @default.
• W4293185937 cites W1978063927 @default.
• W4293185937 cites W1981574050 @default.
• W4293185937 cites W1983167367 @default.
• W4293185937 cites W1985080846 @default.
• W4293185937 cites W1999283686 @default.
• W4293185937 cites W2000919389 @default.
• W4293185937 cites W2002261790 @default.
• W4293185937 cites W2003567294 @default.
• W4293185937 cites W2013125204 @default.
• W4293185937 cites W2018099333 @default.
• W4293185937 cites W2018199534 @default.
• W4293185937 cites W2040608787 @default.
• W4293185937 cites W2041603733 @default.
• W4293185937 cites W2051793518 @default.
• W4293185937 cites W2090151001 @default.
• W4293185937 cites W2093190868 @default.
• W4293185937 cites W2116102522 @default.
• W4293185937 cites W2126745132 @default.
• W4293185937 cites W2132353965 @default.
• W4293185937 cites W2140212259 @default.
• W4293185937 cites W2141788917 @default.
• W4293185937 cites W2167014376 @default.
• W4293185937 cites W2177026027 @default.
• W4293185937 cites W2278418127 @default.
• W4293185937 cites W2484170745 @default.
• W4293185937 cites W2808108259 @default.
• W4293185937 cites W2884838252 @default.
• W4293185937 cites W2938867995 @default.
• W4293185937 cites W2980091012 @default.
• W4293185937 cites W3015386782 @default.
• W4293185937 cites W3139389035 @default.
• W4293185937 cites W579990906 @default.
• W4293185937 cites W2758545998 @default.
• W4293185937 doi "https://doi.org/10.3389/fmech.2022.877754" @default.
• W4293185937 hasPublicationYear "2022" @default.
• W4293185937 type Work @default.
• W4293185937 citedByCount "1" @default.
• W4293185937 countsByYear W42931859372022 @default.
• W4293185937 crossrefType "journal-article" @default.
• W4293185937 hasAuthorship W4293185937A5045896022 @default.
• W4293185937 hasAuthorship W4293185937A5067617591 @default.
• W4293185937 hasAuthorship W4293185937A5068123569 @default.
• W4293185937 hasAuthorship W4293185937A5076597904 @default.
• W4293185937 hasBestOaLocation W42931859371 @default.
• W4293185937 hasConcept C121684516 @default.
• W4293185937 hasConcept C127413603 @default.
• W4293185937 hasConcept C136525101 @default.
• W4293185937 hasConcept C142724271 @default.
• W4293185937 hasConcept C159985019 @default.
• W4293185937 hasConcept C171250308 @default.
• W4293185937 hasConcept C172100665 @default.
• W4293185937 hasConcept C19012869 @default.
• W4293185937 hasConcept C192562407 @default.
• W4293185937 hasConcept C204787440 @default.
• W4293185937 hasConcept C24326235 @default.
• W4293185937 hasConcept C37977207 @default.
• W4293185937 hasConcept C41008148 @default.
• W4293185937 hasConcept C41858301 @default.
• W4293185937 hasConcept C45206210 @default.
• W4293185937 hasConcept C46362747 @default.
• W4293185937 hasConcept C49040817 @default.
• W4293185937 hasConcept C71924100 @default.
• W4293185937 hasConceptScore W4293185937C121684516 @default.
• W4293185937 hasConceptScore W4293185937C127413603 @default.
• W4293185937 hasConceptScore W4293185937C136525101 @default.
• W4293185937 hasConceptScore W4293185937C142724271 @default.
• W4293185937 hasConceptScore W4293185937C159985019 @default.
• W4293185937 hasConceptScore W4293185937C171250308 @default.
• W4293185937 hasConceptScore W4293185937C172100665 @default.
• W4293185937 hasConceptScore W4293185937C19012869 @default.
• W4293185937 hasConceptScore W4293185937C192562407 @default.
• W4293185937 hasConceptScore W4293185937C204787440 @default.
• W4293185937 hasConceptScore W4293185937C24326235 @default.
• W4293185937 hasConceptScore W4293185937C37977207 @default.
• W4293185937 hasConceptScore W4293185937C41008148 @default.
• W4293185937 hasConceptScore W4293185937C41858301 @default.
• W4293185937 hasConceptScore W4293185937C45206210 @default.
• W4293185937 hasConceptScore W4293185937C46362747 @default.
• W4293185937 hasConceptScore W4293185937C49040817 @default.
• W4293185937 hasConceptScore W4293185937C71924100 @default.
• W4293185937 hasLocation W42931859371 @default.
• W4293185937 hasOpenAccess W4293185937 @default.
• W4293185937 hasPrimaryLocation W42931859371 @default.
• W4293185937 hasRelatedWork W2028033597 @default.
• W4293185937 hasRelatedWork W2035196436 @default.
• W4293185937 hasRelatedWork W2039370162 @default.
• W4293185937 hasRelatedWork W2051589821 @default.
• W4293185937 hasRelatedWork W2074683920 @default.
• W4293185937 hasRelatedWork W2110103593 @default.
• W4293185937 hasRelatedWork W2356135623 @default.

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