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- W4293249036 endingPage "195" @default.
- W4293249036 startingPage "185" @default.
- W4293249036 abstract "We found that the high-dose ion-implanted photoresist can be removed with high efficiency without residue by using SPM heated to 250 °C. We evaluated the reaction mechanism in detail, and proposed a model: a heat consumption by vaporization of H2O, a heat gain by decomposition of H2O2, and a character change of SPM itself interact, the high-dose ion-implanted photoresist along with dopants is removed." @default.
- W4293249036 created "2022-08-27" @default.
- W4293249036 creator A5000661234 @default.
- W4293249036 creator A5020994673 @default.
- W4293249036 creator A5035365996 @default.
- W4293249036 creator A5076070750 @default.
- W4293249036 creator A5084728187 @default.
- W4293249036 date "2022-05-20" @default.
- W4293249036 modified "2023-09-29" @default.
- W4293249036 title "(Digital Presentation) High-Dose Ion-Implanted Photoresist Stripping Technology Employing High Temperature Single-Wafer SPM System" @default.
- W4293249036 doi "https://doi.org/10.1149/10804.0185ecst" @default.
- W4293249036 hasPublicationYear "2022" @default.
- W4293249036 type Work @default.
- W4293249036 citedByCount "0" @default.
- W4293249036 crossrefType "journal-article" @default.
- W4293249036 hasAuthorship W4293249036A5000661234 @default.
- W4293249036 hasAuthorship W4293249036A5020994673 @default.
- W4293249036 hasAuthorship W4293249036A5035365996 @default.
- W4293249036 hasAuthorship W4293249036A5076070750 @default.
- W4293249036 hasAuthorship W4293249036A5084728187 @default.
- W4293249036 hasConcept C113196181 @default.
- W4293249036 hasConcept C134406635 @default.
- W4293249036 hasConcept C145148216 @default.
- W4293249036 hasConcept C159985019 @default.
- W4293249036 hasConcept C160671074 @default.
- W4293249036 hasConcept C171250308 @default.
- W4293249036 hasConcept C178790620 @default.
- W4293249036 hasConcept C185592680 @default.
- W4293249036 hasConcept C191952053 @default.
- W4293249036 hasConcept C192562407 @default.
- W4293249036 hasConcept C195801359 @default.
- W4293249036 hasConcept C2779227376 @default.
- W4293249036 hasConcept C41952129 @default.
- W4293249036 hasConcept C43617362 @default.
- W4293249036 hasConcept C49040817 @default.
- W4293249036 hasConcept C57863236 @default.
- W4293249036 hasConceptScore W4293249036C113196181 @default.
- W4293249036 hasConceptScore W4293249036C134406635 @default.
- W4293249036 hasConceptScore W4293249036C145148216 @default.
- W4293249036 hasConceptScore W4293249036C159985019 @default.
- W4293249036 hasConceptScore W4293249036C160671074 @default.
- W4293249036 hasConceptScore W4293249036C171250308 @default.
- W4293249036 hasConceptScore W4293249036C178790620 @default.
- W4293249036 hasConceptScore W4293249036C185592680 @default.
- W4293249036 hasConceptScore W4293249036C191952053 @default.
- W4293249036 hasConceptScore W4293249036C192562407 @default.
- W4293249036 hasConceptScore W4293249036C195801359 @default.
- W4293249036 hasConceptScore W4293249036C2779227376 @default.
- W4293249036 hasConceptScore W4293249036C41952129 @default.
- W4293249036 hasConceptScore W4293249036C43617362 @default.
- W4293249036 hasConceptScore W4293249036C49040817 @default.
- W4293249036 hasConceptScore W4293249036C57863236 @default.
- W4293249036 hasIssue "4" @default.
- W4293249036 hasLocation W42932490361 @default.
- W4293249036 hasOpenAccess W4293249036 @default.
- W4293249036 hasPrimaryLocation W42932490361 @default.
- W4293249036 hasRelatedWork W1802250409 @default.
- W4293249036 hasRelatedWork W1983248817 @default.
- W4293249036 hasRelatedWork W1988420629 @default.
- W4293249036 hasRelatedWork W1995580299 @default.
- W4293249036 hasRelatedWork W2032661179 @default.
- W4293249036 hasRelatedWork W2052216583 @default.
- W4293249036 hasRelatedWork W2310309241 @default.
- W4293249036 hasRelatedWork W2328192285 @default.
- W4293249036 hasRelatedWork W2348065342 @default.
- W4293249036 hasRelatedWork W4247283672 @default.
- W4293249036 hasVolume "108" @default.
- W4293249036 isParatext "false" @default.
- W4293249036 isRetracted "false" @default.
- W4293249036 workType "article" @default.