Matches in SemOpenAlex for { <https://semopenalex.org/work/W4293249184> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W4293249184 endingPage "92" @default.
- W4293249184 startingPage "85" @default.
- W4293249184 abstract "We performed fine analyses on ESR spectra of silicon nitride (SiN) films grown on a Si (0 0 1) substrate via low-pressure chemical vapor deposition and N 2 -annealed at temperatures ranging from 700°C to 1150°C. We observed two types of temperature dependency for the number of Si dangling bonds (DBs): in one case, a maximum occurred at 900°C, and in the other case, the number of DBs increased with increasing temperature over 1000°C. The former type of DBs was associated with defects of the Pb 0 center at the topmost substrate, (three silicon back-bonds present), and the M signal (generated by Si suboxide with one or two oxygen back-bonds). The latter DB group was attributed to the E' center in the natural oxide layer at the interface between the grown SiN layer and the substrate and the K center in the SiN film. Charge breakdown (Qbd) of the MOS capacitor is strongly related to both DB groups and may have started at the defect associated with the Si suboxide state." @default.
- W4293249184 created "2022-08-27" @default.
- W4293249184 creator A5024689201 @default.
- W4293249184 creator A5035156230 @default.
- W4293249184 creator A5037273320 @default.
- W4293249184 creator A5048564997 @default.
- W4293249184 date "2022-05-20" @default.
- W4293249184 modified "2023-10-18" @default.
- W4293249184 title "(Digital Presentation) Effect of N<sub>2</sub>-Anneal Temperature on Silicon Nitride Film: (II) Fine Structures of ESR Spectrum and FTIR" @default.
- W4293249184 doi "https://doi.org/10.1149/10804.0085ecst" @default.
- W4293249184 hasPublicationYear "2022" @default.
- W4293249184 type Work @default.
- W4293249184 citedByCount "0" @default.
- W4293249184 crossrefType "journal-article" @default.
- W4293249184 hasAuthorship W4293249184A5024689201 @default.
- W4293249184 hasAuthorship W4293249184A5035156230 @default.
- W4293249184 hasAuthorship W4293249184A5037273320 @default.
- W4293249184 hasAuthorship W4293249184A5048564997 @default.
- W4293249184 hasConcept C111368507 @default.
- W4293249184 hasConcept C113196181 @default.
- W4293249184 hasConcept C127313418 @default.
- W4293249184 hasConcept C171250308 @default.
- W4293249184 hasConcept C185592680 @default.
- W4293249184 hasConcept C192562407 @default.
- W4293249184 hasConcept C194760766 @default.
- W4293249184 hasConcept C2777289219 @default.
- W4293249184 hasConcept C2777431650 @default.
- W4293249184 hasConcept C2779227376 @default.
- W4293249184 hasConcept C2780634616 @default.
- W4293249184 hasConcept C32424582 @default.
- W4293249184 hasConcept C43617362 @default.
- W4293249184 hasConcept C49040817 @default.
- W4293249184 hasConcept C544956773 @default.
- W4293249184 hasConcept C57410435 @default.
- W4293249184 hasConceptScore W4293249184C111368507 @default.
- W4293249184 hasConceptScore W4293249184C113196181 @default.
- W4293249184 hasConceptScore W4293249184C127313418 @default.
- W4293249184 hasConceptScore W4293249184C171250308 @default.
- W4293249184 hasConceptScore W4293249184C185592680 @default.
- W4293249184 hasConceptScore W4293249184C192562407 @default.
- W4293249184 hasConceptScore W4293249184C194760766 @default.
- W4293249184 hasConceptScore W4293249184C2777289219 @default.
- W4293249184 hasConceptScore W4293249184C2777431650 @default.
- W4293249184 hasConceptScore W4293249184C2779227376 @default.
- W4293249184 hasConceptScore W4293249184C2780634616 @default.
- W4293249184 hasConceptScore W4293249184C32424582 @default.
- W4293249184 hasConceptScore W4293249184C43617362 @default.
- W4293249184 hasConceptScore W4293249184C49040817 @default.
- W4293249184 hasConceptScore W4293249184C544956773 @default.
- W4293249184 hasConceptScore W4293249184C57410435 @default.
- W4293249184 hasIssue "4" @default.
- W4293249184 hasLocation W42932491841 @default.
- W4293249184 hasOpenAccess W4293249184 @default.
- W4293249184 hasPrimaryLocation W42932491841 @default.
- W4293249184 hasRelatedWork W1873547521 @default.
- W4293249184 hasRelatedWork W1976526616 @default.
- W4293249184 hasRelatedWork W1997998638 @default.
- W4293249184 hasRelatedWork W2051362955 @default.
- W4293249184 hasRelatedWork W2059727548 @default.
- W4293249184 hasRelatedWork W2165653175 @default.
- W4293249184 hasRelatedWork W2169757209 @default.
- W4293249184 hasRelatedWork W3140127075 @default.
- W4293249184 hasRelatedWork W4225347794 @default.
- W4293249184 hasRelatedWork W823364632 @default.
- W4293249184 hasVolume "108" @default.
- W4293249184 isParatext "false" @default.
- W4293249184 isRetracted "false" @default.
- W4293249184 workType "article" @default.