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- W4293586344 abstract "Higher resolution demands for semiconductor lithography may be fulfilled by higher numerical aperture (NA) systems. However, NAs more than the photoresist refractive index (~1.7) cause surface confinement of the image. In this letter we describe how evanescent wave coupling to effective gain medium surface states beneath the imaging layer can counter this problem. At {lambda}=193 nm a layer of sapphire on SiO2 counters image decay by an effective-gain-medium resonance phenomena allowing evanescent interferometric lithography to create high aspect ratio structures at NAs of 1.85 (26-nm) and beyond." @default.
- W4293586344 created "2022-08-30" @default.
- W4293586344 creator A5000381998 @default.
- W4293586344 creator A5038962561 @default.
- W4293586344 creator A5070826242 @default.
- W4293586344 date "2012-06-19" @default.
- W4293586344 modified "2023-09-27" @default.
- W4293586344 title "Super-resolution Imaging by Evanescent Wave Coupling to Surface States on Effective Gain Media" @default.
- W4293586344 doi "https://doi.org/10.48550/arxiv.1206.4148" @default.
- W4293586344 hasPublicationYear "2012" @default.
- W4293586344 type Work @default.
- W4293586344 citedByCount "0" @default.
- W4293586344 crossrefType "posted-content" @default.
- W4293586344 hasAuthorship W4293586344A5000381998 @default.
- W4293586344 hasAuthorship W4293586344A5038962561 @default.
- W4293586344 hasAuthorship W4293586344A5070826242 @default.
- W4293586344 hasBestOaLocation W42935863441 @default.
- W4293586344 hasConcept C109214941 @default.
- W4293586344 hasConcept C120665830 @default.
- W4293586344 hasConcept C121332964 @default.
- W4293586344 hasConcept C131584629 @default.
- W4293586344 hasConcept C134406635 @default.
- W4293586344 hasConcept C139210041 @default.
- W4293586344 hasConcept C159108749 @default.
- W4293586344 hasConcept C166689943 @default.
- W4293586344 hasConcept C171250308 @default.
- W4293586344 hasConcept C191897082 @default.
- W4293586344 hasConcept C192562407 @default.
- W4293586344 hasConcept C204223013 @default.
- W4293586344 hasConcept C2779227376 @default.
- W4293586344 hasConcept C2780064504 @default.
- W4293586344 hasConcept C42067758 @default.
- W4293586344 hasConcept C49040817 @default.
- W4293586344 hasConcept C520434653 @default.
- W4293586344 hasConcept C6260449 @default.
- W4293586344 hasConcept C84174578 @default.
- W4293586344 hasConcept C94631461 @default.
- W4293586344 hasConceptScore W4293586344C109214941 @default.
- W4293586344 hasConceptScore W4293586344C120665830 @default.
- W4293586344 hasConceptScore W4293586344C121332964 @default.
- W4293586344 hasConceptScore W4293586344C131584629 @default.
- W4293586344 hasConceptScore W4293586344C134406635 @default.
- W4293586344 hasConceptScore W4293586344C139210041 @default.
- W4293586344 hasConceptScore W4293586344C159108749 @default.
- W4293586344 hasConceptScore W4293586344C166689943 @default.
- W4293586344 hasConceptScore W4293586344C171250308 @default.
- W4293586344 hasConceptScore W4293586344C191897082 @default.
- W4293586344 hasConceptScore W4293586344C192562407 @default.
- W4293586344 hasConceptScore W4293586344C204223013 @default.
- W4293586344 hasConceptScore W4293586344C2779227376 @default.
- W4293586344 hasConceptScore W4293586344C2780064504 @default.
- W4293586344 hasConceptScore W4293586344C42067758 @default.
- W4293586344 hasConceptScore W4293586344C49040817 @default.
- W4293586344 hasConceptScore W4293586344C520434653 @default.
- W4293586344 hasConceptScore W4293586344C6260449 @default.
- W4293586344 hasConceptScore W4293586344C84174578 @default.
- W4293586344 hasConceptScore W4293586344C94631461 @default.
- W4293586344 hasLocation W42935863441 @default.
- W4293586344 hasOpenAccess W4293586344 @default.
- W4293586344 hasPrimaryLocation W42935863441 @default.
- W4293586344 hasRelatedWork W1758645137 @default.
- W4293586344 hasRelatedWork W1965591598 @default.
- W4293586344 hasRelatedWork W2001303626 @default.
- W4293586344 hasRelatedWork W2077275283 @default.
- W4293586344 hasRelatedWork W2084655580 @default.
- W4293586344 hasRelatedWork W2294687285 @default.
- W4293586344 hasRelatedWork W4281742609 @default.
- W4293586344 hasRelatedWork W4293586344 @default.
- W4293586344 hasRelatedWork W809400194 @default.
- W4293586344 hasRelatedWork W942427343 @default.
- W4293586344 isParatext "false" @default.
- W4293586344 isRetracted "false" @default.
- W4293586344 workType "article" @default.