Matches in SemOpenAlex for { <https://semopenalex.org/work/W4293766730> ?p ?o ?g. }
Showing items 1 to 79 of
79
with 100 items per page.
- W4293766730 endingPage "05060" @default.
- W4293766730 startingPage "05060" @default.
- W4293766730 abstract "In practical semiconductor fabs engineering, in order to reduce the investment cost, low coverage rate of FFUs is usually adopted and the air supply velocity is high, which brings high resistance to the filter mounted at FFU’s outlet. If a higher ceiling coverage and lower air velocity speed are used, the resistance may be significantly reduced and remarkable energy saving benefits can be obtained. In this study, CFD technology was adopted to simulate airflow in a semiconductor fab and air circulation resistance was obtained by theoretical calculation. Four ceiling coverage of FFUs, 25%, 50%, 75%, 100%, were studied under the condition of same air volume. The particle concentrations and payback period were analysed. The results show that (1) with the increase of the coverage rate, the concentration in most areas decreases significantly while only a small increase in the local area around occupant, and the particle concentration still meets the requirement; (2) adopting high coverage rate for transformation, the initial investment of FFUs increases slightly and the operating cost decreases significantly, and the payback period is only 1.1-2.3 years when 25% coverage rate is transformed into 37.5% - 75%." @default.
- W4293766730 created "2022-08-31" @default.
- W4293766730 creator A5008019926 @default.
- W4293766730 creator A5012204485 @default.
- W4293766730 creator A5026639238 @default.
- W4293766730 date "2022-01-01" @default.
- W4293766730 modified "2023-09-25" @default.
- W4293766730 title "Numerical Analysis on Performance of Different Ceiling Coverage of fan Filter Units in Semiconductor Fabs" @default.
- W4293766730 cites W1969190100 @default.
- W4293766730 cites W1981401379 @default.
- W4293766730 cites W2056160248 @default.
- W4293766730 cites W2063586711 @default.
- W4293766730 cites W2480374633 @default.
- W4293766730 doi "https://doi.org/10.1051/e3sconf/202235605060" @default.
- W4293766730 hasPublicationYear "2022" @default.
- W4293766730 type Work @default.
- W4293766730 citedByCount "0" @default.
- W4293766730 crossrefType "journal-article" @default.
- W4293766730 hasAuthorship W4293766730A5008019926 @default.
- W4293766730 hasAuthorship W4293766730A5012204485 @default.
- W4293766730 hasAuthorship W4293766730A5026639238 @default.
- W4293766730 hasBestOaLocation W42937667301 @default.
- W4293766730 hasConcept C108225325 @default.
- W4293766730 hasConcept C116067010 @default.
- W4293766730 hasConcept C119599485 @default.
- W4293766730 hasConcept C121332964 @default.
- W4293766730 hasConcept C127413603 @default.
- W4293766730 hasConcept C139719470 @default.
- W4293766730 hasConcept C144553756 @default.
- W4293766730 hasConcept C162324750 @default.
- W4293766730 hasConcept C171146098 @default.
- W4293766730 hasConcept C172120300 @default.
- W4293766730 hasConcept C192562407 @default.
- W4293766730 hasConcept C2777489069 @default.
- W4293766730 hasConcept C2778348673 @default.
- W4293766730 hasConcept C39432304 @default.
- W4293766730 hasConcept C57879066 @default.
- W4293766730 hasConcept C66938386 @default.
- W4293766730 hasConcept C78519656 @default.
- W4293766730 hasConcept C87717796 @default.
- W4293766730 hasConceptScore W4293766730C108225325 @default.
- W4293766730 hasConceptScore W4293766730C116067010 @default.
- W4293766730 hasConceptScore W4293766730C119599485 @default.
- W4293766730 hasConceptScore W4293766730C121332964 @default.
- W4293766730 hasConceptScore W4293766730C127413603 @default.
- W4293766730 hasConceptScore W4293766730C139719470 @default.
- W4293766730 hasConceptScore W4293766730C144553756 @default.
- W4293766730 hasConceptScore W4293766730C162324750 @default.
- W4293766730 hasConceptScore W4293766730C171146098 @default.
- W4293766730 hasConceptScore W4293766730C172120300 @default.
- W4293766730 hasConceptScore W4293766730C192562407 @default.
- W4293766730 hasConceptScore W4293766730C2777489069 @default.
- W4293766730 hasConceptScore W4293766730C2778348673 @default.
- W4293766730 hasConceptScore W4293766730C39432304 @default.
- W4293766730 hasConceptScore W4293766730C57879066 @default.
- W4293766730 hasConceptScore W4293766730C66938386 @default.
- W4293766730 hasConceptScore W4293766730C78519656 @default.
- W4293766730 hasConceptScore W4293766730C87717796 @default.
- W4293766730 hasLocation W42937667301 @default.
- W4293766730 hasLocation W42937667302 @default.
- W4293766730 hasLocation W42937667303 @default.
- W4293766730 hasOpenAccess W4293766730 @default.
- W4293766730 hasPrimaryLocation W42937667301 @default.
- W4293766730 hasRelatedWork W20975128 @default.
- W4293766730 hasRelatedWork W2100309886 @default.
- W4293766730 hasRelatedWork W2151215798 @default.
- W4293766730 hasRelatedWork W2335668071 @default.
- W4293766730 hasRelatedWork W2380780500 @default.
- W4293766730 hasRelatedWork W2588228136 @default.
- W4293766730 hasRelatedWork W2588229805 @default.
- W4293766730 hasRelatedWork W2899084033 @default.
- W4293766730 hasRelatedWork W3167508538 @default.
- W4293766730 hasRelatedWork W4293766730 @default.
- W4293766730 hasVolume "356" @default.
- W4293766730 isParatext "false" @default.
- W4293766730 isRetracted "false" @default.
- W4293766730 workType "article" @default.