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- W4293868655 abstract "We present the development and experimen-tal characterisation of silicon micromachined components for waveguide metrology from 0.5-1.1 THz. Silicon micromachining offers high precision and uniformity, while the mechanical properties of silicon allow for the creation of extremely thin layers. We harness these capabilities to create waveguide lines for the WM-380 (0.5-0.75 THz) and WM-250 (0.75-1.1 THz) bands in thicknesses as low as 70 µm, The development of such components enables new solutions in the field of THz metrology due to their high precision, repeatability and scaleable manu-facturing. The experimental performance of the components is first characterised using commerical vector network analyzer calibration standards. The micromachined components are then used to implement Through-Reflect-Line calibrations in both bands, which are used to error correct multiple devices. The micromachined lines offer return losses as high as 40 dB, while their expanded phase uncertainty is as low as 2°." @default.
- W4293868655 created "2022-09-01" @default.
- W4293868655 creator A5011418912 @default.
- W4293868655 creator A5043369530 @default.
- W4293868655 date "2022-06-19" @default.
- W4293868655 modified "2023-10-16" @default.
- W4293868655 title "Silicon Micromachined Metrology Components for 0.5-1.1 THz" @default.
- W4293868655 cites W2151288128 @default.
- W4293868655 cites W2218780409 @default.
- W4293868655 cites W2592631481 @default.
- W4293868655 cites W2673894687 @default.
- W4293868655 cites W2787023082 @default.
- W4293868655 cites W3192740019 @default.
- W4293868655 cites W2128469309 @default.
- W4293868655 doi "https://doi.org/10.1109/ims37962.2022.9865544" @default.
- W4293868655 hasPublicationYear "2022" @default.
- W4293868655 type Work @default.
- W4293868655 citedByCount "0" @default.
- W4293868655 crossrefType "proceedings-article" @default.
- W4293868655 hasAuthorship W4293868655A5011418912 @default.
- W4293868655 hasAuthorship W4293868655A5043369530 @default.
- W4293868655 hasConcept C107816215 @default.
- W4293868655 hasConcept C120665830 @default.
- W4293868655 hasConcept C121332964 @default.
- W4293868655 hasConcept C127413603 @default.
- W4293868655 hasConcept C136525101 @default.
- W4293868655 hasConcept C142724271 @default.
- W4293868655 hasConcept C145667562 @default.
- W4293868655 hasConcept C154020017 @default.
- W4293868655 hasConcept C165838908 @default.
- W4293868655 hasConcept C166689943 @default.
- W4293868655 hasConcept C185592680 @default.
- W4293868655 hasConcept C192562407 @default.
- W4293868655 hasConcept C195766429 @default.
- W4293868655 hasConcept C200687136 @default.
- W4293868655 hasConcept C204787440 @default.
- W4293868655 hasConcept C24326235 @default.
- W4293868655 hasConcept C43617362 @default.
- W4293868655 hasConcept C49040817 @default.
- W4293868655 hasConcept C544956773 @default.
- W4293868655 hasConcept C62520636 @default.
- W4293868655 hasConcept C71924100 @default.
- W4293868655 hasConcept C99101257 @default.
- W4293868655 hasConceptScore W4293868655C107816215 @default.
- W4293868655 hasConceptScore W4293868655C120665830 @default.
- W4293868655 hasConceptScore W4293868655C121332964 @default.
- W4293868655 hasConceptScore W4293868655C127413603 @default.
- W4293868655 hasConceptScore W4293868655C136525101 @default.
- W4293868655 hasConceptScore W4293868655C142724271 @default.
- W4293868655 hasConceptScore W4293868655C145667562 @default.
- W4293868655 hasConceptScore W4293868655C154020017 @default.
- W4293868655 hasConceptScore W4293868655C165838908 @default.
- W4293868655 hasConceptScore W4293868655C166689943 @default.
- W4293868655 hasConceptScore W4293868655C185592680 @default.
- W4293868655 hasConceptScore W4293868655C192562407 @default.
- W4293868655 hasConceptScore W4293868655C195766429 @default.
- W4293868655 hasConceptScore W4293868655C200687136 @default.
- W4293868655 hasConceptScore W4293868655C204787440 @default.
- W4293868655 hasConceptScore W4293868655C24326235 @default.
- W4293868655 hasConceptScore W4293868655C43617362 @default.
- W4293868655 hasConceptScore W4293868655C49040817 @default.
- W4293868655 hasConceptScore W4293868655C544956773 @default.
- W4293868655 hasConceptScore W4293868655C62520636 @default.
- W4293868655 hasConceptScore W4293868655C71924100 @default.
- W4293868655 hasConceptScore W4293868655C99101257 @default.
- W4293868655 hasLocation W42938686551 @default.
- W4293868655 hasOpenAccess W4293868655 @default.
- W4293868655 hasPrimaryLocation W42938686551 @default.
- W4293868655 hasRelatedWork W2001195527 @default.
- W4293868655 hasRelatedWork W2020730060 @default.
- W4293868655 hasRelatedWork W2033686348 @default.
- W4293868655 hasRelatedWork W2054833014 @default.
- W4293868655 hasRelatedWork W2060621643 @default.
- W4293868655 hasRelatedWork W2068355704 @default.
- W4293868655 hasRelatedWork W2151080099 @default.
- W4293868655 hasRelatedWork W2326273876 @default.
- W4293868655 hasRelatedWork W2333321165 @default.
- W4293868655 hasRelatedWork W2793377474 @default.
- W4293868655 isParatext "false" @default.
- W4293868655 isRetracted "false" @default.
- W4293868655 workType "article" @default.