FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4294643325> ?p ?o ?g. }

• W4294643325 endingPage "1747" @default.
• W4294643325 startingPage "1744" @default.
• W4294643325 abstract "This letter presents a piezoelectric tuning fork resonator vibrating in in-plane flexural mode with a high quality factor (Q) and low motional impedance. A novel double-sided actuating design is implemented based on unimorph structure with a 2.5- <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$mu text{m}$ </tex-math></inline-formula> -thick AlN film as passive layer. The design significantly improves the Q and motional impedance compared with the conventional single-sided actuating design thanks to an increase of static capacitance without change of material interfaces. The proposed double-sided actuating device shows an excellent Q measured as 11272 with an extracted motional impedance of 7.2 <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink> <tex-math notation=LaTeX>$text{k}Omega $ </tex-math></inline-formula> in vacuum. The measured Q-pressure relationship shows that a vacuum level <100 Pa would ensure a sufficiently high Q value, which can be easily achieved through wafer-to-wafer bonding with getters in the future. Furthermore, the impact of AlN passive layer thickness on the resonator performance is analyzed. The proposed device would find applications in sensing fields as miniaturized and high-performance resonator-based solutions, such as gyroscopes, accelerometers and pressure sensors." @default.
• W4294643325 created "2022-09-05" @default.
• W4294643325 creator A5000475226 @default.
• W4294643325 creator A5009372218 @default.
• W4294643325 creator A5015903486 @default.
• W4294643325 creator A5027798166 @default.
• W4294643325 creator A5049048587 @default.
• W4294643325 creator A5061256803 @default.
• W4294643325 creator A5073972470 @default.
• W4294643325 creator A5079731588 @default.
• W4294643325 creator A5080813854 @default.
• W4294643325 date "2022-10-01" @default.
• W4294643325 modified "2023-10-16" @default.
• W4294643325 title "High Quality Factor and Low Motional Impedance Aluminum Nitride Tuning Fork Resonators Vibrating in In-Plane Flexural Mode" @default.
• W4294643325 cites W1595610629 @default.
• W4294643325 cites W1977865810 @default.
• W4294643325 cites W2018045805 @default.
• W4294643325 cites W2022099059 @default.
• W4294643325 cites W2057090774 @default.
• W4294643325 cites W2073593223 @default.
• W4294643325 cites W2119006805 @default.
• W4294643325 cites W2147904050 @default.
• W4294643325 cites W2167630780 @default.
• W4294643325 cites W2544976212 @default.
• W4294643325 cites W2567646121 @default.
• W4294643325 cites W2809351142 @default.
• W4294643325 cites W2969277964 @default.
• W4294643325 cites W2969728303 @default.
• W4294643325 cites W2977414651 @default.
• W4294643325 cites W2990722913 @default.
• W4294643325 cites W3084672746 @default.
• W4294643325 cites W3088129874 @default.
• W4294643325 doi "https://doi.org/10.1109/led.2022.3204172" @default.
• W4294643325 hasPublicationYear "2022" @default.
• W4294643325 type Work @default.
• W4294643325 citedByCount "1" @default.
• W4294643325 countsByYear W42946433252023 @default.
• W4294643325 crossrefType "journal-article" @default.
• W4294643325 hasAuthorship W4294643325A5000475226 @default.
• W4294643325 hasAuthorship W4294643325A5009372218 @default.
• W4294643325 hasAuthorship W4294643325A5015903486 @default.
• W4294643325 hasAuthorship W4294643325A5027798166 @default.
• W4294643325 hasAuthorship W4294643325A5049048587 @default.
• W4294643325 hasAuthorship W4294643325A5061256803 @default.
• W4294643325 hasAuthorship W4294643325A5073972470 @default.
• W4294643325 hasAuthorship W4294643325A5079731588 @default.
• W4294643325 hasAuthorship W4294643325A5080813854 @default.
• W4294643325 hasConcept C107677527 @default.
• W4294643325 hasConcept C119599485 @default.
• W4294643325 hasConcept C121332964 @default.
• W4294643325 hasConcept C127413603 @default.
• W4294643325 hasConcept C158488048 @default.
• W4294643325 hasConcept C160671074 @default.
• W4294643325 hasConcept C17525397 @default.
• W4294643325 hasConcept C17829176 @default.
• W4294643325 hasConcept C187725362 @default.
• W4294643325 hasConcept C192562407 @default.
• W4294643325 hasConcept C198394728 @default.
• W4294643325 hasConcept C24890656 @default.
• W4294643325 hasConcept C30066665 @default.
• W4294643325 hasConcept C49040817 @default.
• W4294643325 hasConcept C62520636 @default.
• W4294643325 hasConcept C97126364 @default.
• W4294643325 hasConceptScore W4294643325C107677527 @default.
• W4294643325 hasConceptScore W4294643325C119599485 @default.
• W4294643325 hasConceptScore W4294643325C121332964 @default.
• W4294643325 hasConceptScore W4294643325C127413603 @default.
• W4294643325 hasConceptScore W4294643325C158488048 @default.
• W4294643325 hasConceptScore W4294643325C160671074 @default.
• W4294643325 hasConceptScore W4294643325C17525397 @default.
• W4294643325 hasConceptScore W4294643325C17829176 @default.
• W4294643325 hasConceptScore W4294643325C187725362 @default.
• W4294643325 hasConceptScore W4294643325C192562407 @default.
• W4294643325 hasConceptScore W4294643325C198394728 @default.
• W4294643325 hasConceptScore W4294643325C24890656 @default.
• W4294643325 hasConceptScore W4294643325C30066665 @default.
• W4294643325 hasConceptScore W4294643325C49040817 @default.
• W4294643325 hasConceptScore W4294643325C62520636 @default.
• W4294643325 hasConceptScore W4294643325C97126364 @default.
• W4294643325 hasFunder F4320335777 @default.
• W4294643325 hasFunder F4320336773 @default.
• W4294643325 hasIssue "10" @default.
• W4294643325 hasLocation W42946433251 @default.
• W4294643325 hasOpenAccess W4294643325 @default.
• W4294643325 hasPrimaryLocation W42946433251 @default.
• W4294643325 hasRelatedWork W1997450548 @default.
• W4294643325 hasRelatedWork W2015784946 @default.
• W4294643325 hasRelatedWork W2039286437 @default.
• W4294643325 hasRelatedWork W2042316372 @default.
• W4294643325 hasRelatedWork W2054124615 @default.
• W4294643325 hasRelatedWork W2063408408 @default.
• W4294643325 hasRelatedWork W2127484235 @default.
• W4294643325 hasRelatedWork W2353852911 @default.
• W4294643325 hasRelatedWork W2892039293 @default.
• W4294643325 hasRelatedWork W4294643325 @default.
• W4294643325 hasVolume "43" @default.
• W4294643325 isParatext "false" @default.
• W4294643325 isRetracted "false" @default.

• next