Matches in SemOpenAlex for { <https://semopenalex.org/work/W4295037012> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W4295037012 abstract "In order to improve the performance stability, MEMS devices often adopt sealed packaging, and the long-term reliability is highly correlated with the atmosphere inside the packing cavity. However, during long-term use, MEMS devices are exposed to a variety of environmental stresses such as temperature stress. It would cause the atmosphere inside sealed cavity of MEMS devices to change gradually, that deteriorates the long-term reliability of MEMS devices. In this paper, the evolution of the atmosphere inside MEMS devices was studied. The acceleration experiments of high-temperature and thermal shock were implemented, and the measured results of internal atmosphere were obtained. The experimental results show that the moisture content and hydrogen content of the samples before the experiment have good consistency, and the maximum values are 925 ppm and 4525 ppm, respectively. However, after 500 hours of high temperature experiment, the contents of moisture and hydrogen in the cavity increased significantly by 455% and 158%, respectively, and their maximum values are 9711 ppm and 14400 ppm, respectively. On the other hand, the moisture content increased by 12% and the hydrogen content changed by 33% after 100 cycles thermal shock. The source of increased internal gas was discussed. In addition, the influence of hydrogen on vacuum-packaged MEMS devices was studied. This work is helpful for designers to understand the atmosphere evolution inside MEMS devices and improve the long-term reliability of MEMS devices." @default.
- W4295037012 created "2022-09-09" @default.
- W4295037012 creator A5010441295 @default.
- W4295037012 creator A5013689883 @default.
- W4295037012 creator A5014490959 @default.
- W4295037012 creator A5033939988 @default.
- W4295037012 creator A5041365934 @default.
- W4295037012 creator A5081230522 @default.
- W4295037012 date "2022-08-10" @default.
- W4295037012 modified "2023-10-06" @default.
- W4295037012 title "Long-term Reliability Evaluation of Internal Atmosphere on Sealed Packaged MEMS Devices" @default.
- W4295037012 cites W2564288867 @default.
- W4295037012 cites W2577800958 @default.
- W4295037012 cites W2588771306 @default.
- W4295037012 cites W2596275505 @default.
- W4295037012 cites W2943862265 @default.
- W4295037012 cites W3011277539 @default.
- W4295037012 cites W3085242072 @default.
- W4295037012 cites W3199680381 @default.
- W4295037012 doi "https://doi.org/10.1109/icept56209.2022.9872593" @default.
- W4295037012 hasPublicationYear "2022" @default.
- W4295037012 type Work @default.
- W4295037012 citedByCount "1" @default.
- W4295037012 crossrefType "proceedings-article" @default.
- W4295037012 hasAuthorship W4295037012A5010441295 @default.
- W4295037012 hasAuthorship W4295037012A5013689883 @default.
- W4295037012 hasAuthorship W4295037012A5014490959 @default.
- W4295037012 hasAuthorship W4295037012A5033939988 @default.
- W4295037012 hasAuthorship W4295037012A5041365934 @default.
- W4295037012 hasAuthorship W4295037012A5081230522 @default.
- W4295037012 hasConcept C116915560 @default.
- W4295037012 hasConcept C121332964 @default.
- W4295037012 hasConcept C126322002 @default.
- W4295037012 hasConcept C127413603 @default.
- W4295037012 hasConcept C159985019 @default.
- W4295037012 hasConcept C163258240 @default.
- W4295037012 hasConcept C176177977 @default.
- W4295037012 hasConcept C176864760 @default.
- W4295037012 hasConcept C178790620 @default.
- W4295037012 hasConcept C185592680 @default.
- W4295037012 hasConcept C187320778 @default.
- W4295037012 hasConcept C192562407 @default.
- W4295037012 hasConcept C24939127 @default.
- W4295037012 hasConcept C2781300812 @default.
- W4295037012 hasConcept C37977207 @default.
- W4295037012 hasConcept C43214815 @default.
- W4295037012 hasConcept C49040817 @default.
- W4295037012 hasConcept C512968161 @default.
- W4295037012 hasConcept C65440619 @default.
- W4295037012 hasConcept C71924100 @default.
- W4295037012 hasConcept C97355855 @default.
- W4295037012 hasConceptScore W4295037012C116915560 @default.
- W4295037012 hasConceptScore W4295037012C121332964 @default.
- W4295037012 hasConceptScore W4295037012C126322002 @default.
- W4295037012 hasConceptScore W4295037012C127413603 @default.
- W4295037012 hasConceptScore W4295037012C159985019 @default.
- W4295037012 hasConceptScore W4295037012C163258240 @default.
- W4295037012 hasConceptScore W4295037012C176177977 @default.
- W4295037012 hasConceptScore W4295037012C176864760 @default.
- W4295037012 hasConceptScore W4295037012C178790620 @default.
- W4295037012 hasConceptScore W4295037012C185592680 @default.
- W4295037012 hasConceptScore W4295037012C187320778 @default.
- W4295037012 hasConceptScore W4295037012C192562407 @default.
- W4295037012 hasConceptScore W4295037012C24939127 @default.
- W4295037012 hasConceptScore W4295037012C2781300812 @default.
- W4295037012 hasConceptScore W4295037012C37977207 @default.
- W4295037012 hasConceptScore W4295037012C43214815 @default.
- W4295037012 hasConceptScore W4295037012C49040817 @default.
- W4295037012 hasConceptScore W4295037012C512968161 @default.
- W4295037012 hasConceptScore W4295037012C65440619 @default.
- W4295037012 hasConceptScore W4295037012C71924100 @default.
- W4295037012 hasConceptScore W4295037012C97355855 @default.
- W4295037012 hasFunder F4320335787 @default.
- W4295037012 hasLocation W42950370121 @default.
- W4295037012 hasOpenAccess W4295037012 @default.
- W4295037012 hasPrimaryLocation W42950370121 @default.
- W4295037012 hasRelatedWork W2006975652 @default.
- W4295037012 hasRelatedWork W2056698721 @default.
- W4295037012 hasRelatedWork W2081054485 @default.
- W4295037012 hasRelatedWork W2090573852 @default.
- W4295037012 hasRelatedWork W2334026333 @default.
- W4295037012 hasRelatedWork W2349952023 @default.
- W4295037012 hasRelatedWork W2385353382 @default.
- W4295037012 hasRelatedWork W2389059248 @default.
- W4295037012 hasRelatedWork W3203097335 @default.
- W4295037012 hasRelatedWork W4312324255 @default.
- W4295037012 isParatext "false" @default.
- W4295037012 isRetracted "false" @default.
- W4295037012 workType "article" @default.