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• W4295308355 endingPage "7477" @default.
• W4295308355 startingPage "7467" @default.
• W4295308355 abstract "Precise force sensing is essential for the mechanical characterization and robotic micromanipulation of biological targets. In this work, a high-resolution microelectromechanical system capacitive force sensor is proposed for measuring ultralow multiphysics. A bionic swallow structure that contained multiple feathered comb arrays is designed for reducing chip dimension and eliminating undesirable mechanical cross-coupling effect. The comb structure is optimized for maximum sensitivity, linearity, and compact chip size. Utilizing a novel interconnection configuration, interferences derived from parasitic capacitance and electrostatic forces exerted negligible effects on the sensor output. The proposed bionic force sensor is fabricated following a simple three-mask process and integrated with application-specific integrated circuit readouts. Its measuring sensitivity is 7.151 fF/nm, 0.529 aF/nN, and 4.247 pF/g for displacement, force, and inclination measurements, respectively. The proposed sensor has a large measurement range of 1000.00 nm and 13.83 μN with a high linearity of 0.9998. The 1-σ resolution is 0.0328 nm and 0.4436 nN, and the noise floor resolution is 0.0044 nm <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink><tex-math notation=LaTeX>$sqrt {mathbf{Hz}} $</tex-math></inline-formula> and 0.0597 nN/ <inline-formula xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink><tex-math notation=LaTeX>$sqrt {mathbf{Hz}} $</tex-math></inline-formula> for displacement and force measurements, respectively. The bias stability of Allan deviance is 0.0050 nm and 0.0678 nN at an integration time of 0.65 s. The proposed bionic swallow sensor exhibits considerable improvement over existing capacitive sensors and feasibility for ultralow multiphysics measurement in biomedical applications." @default.
• W4295308355 created "2022-09-12" @default.
• W4295308355 creator A5012898355 @default.
• W4295308355 creator A5032692020 @default.
• W4295308355 creator A5033373769 @default.
• W4295308355 creator A5040437342 @default.
• W4295308355 creator A5061130555 @default.
• W4295308355 creator A5072118178 @default.
• W4295308355 creator A5090242606 @default.
• W4295308355 date "2023-07-01" @default.
• W4295308355 modified "2023-10-11" @default.
• W4295308355 title "A High-Resolution MEMS Capacitive Force Sensor With Bionic Swallow Comb Arrays for Ultralow Multiphysics Measurement" @default.
• W4295308355 cites W2043925538 @default.
• W4295308355 cites W2082784368 @default.
• W4295308355 cites W2109470307 @default.
• W4295308355 cites W2327980960 @default.
• W4295308355 cites W2611870074 @default.
• W4295308355 cites W2795040367 @default.
• W4295308355 cites W2802298068 @default.
• W4295308355 cites W2816192171 @default.
• W4295308355 cites W2900453097 @default.
• W4295308355 cites W2905488308 @default.
• W4295308355 cites W2908480305 @default.
• W4295308355 cites W2918916256 @default.
• W4295308355 cites W2921682485 @default.
• W4295308355 cites W2955495303 @default.
• W4295308355 cites W2982528182 @default.
• W4295308355 cites W2994317030 @default.
• W4295308355 cites W2995781073 @default.
• W4295308355 cites W2999050663 @default.
• W4295308355 cites W3012438532 @default.
• W4295308355 cites W3015619856 @default.
• W4295308355 cites W3021332631 @default.
• W4295308355 cites W3021541816 @default.
• W4295308355 cites W3024174628 @default.
• W4295308355 cites W3031447664 @default.
• W4295308355 cites W3032095623 @default.
• W4295308355 cites W3038347956 @default.
• W4295308355 cites W3046470538 @default.
• W4295308355 cites W3080217833 @default.
• W4295308355 cites W3097122750 @default.
• W4295308355 cites W3118802274 @default.
• W4295308355 cites W3152558908 @default.
• W4295308355 cites W3161216528 @default.
• W4295308355 cites W4225128668 @default.
• W4295308355 cites W4291035488 @default.
• W4295308355 doi "https://doi.org/10.1109/tie.2022.3203756" @default.
• W4295308355 hasPublicationYear "2023" @default.
• W4295308355 type Work @default.
• W4295308355 citedByCount "2" @default.
• W4295308355 countsByYear W42953083552023 @default.
• W4295308355 crossrefType "journal-article" @default.
• W4295308355 hasAuthorship W4295308355A5012898355 @default.
• W4295308355 hasAuthorship W4295308355A5032692020 @default.
• W4295308355 hasAuthorship W4295308355A5033373769 @default.
• W4295308355 hasAuthorship W4295308355A5040437342 @default.
• W4295308355 hasAuthorship W4295308355A5061130555 @default.
• W4295308355 hasAuthorship W4295308355A5072118178 @default.
• W4295308355 hasAuthorship W4295308355A5090242606 @default.
• W4295308355 hasConcept C102951782 @default.
• W4295308355 hasConcept C119473381 @default.
• W4295308355 hasConcept C119599485 @default.
• W4295308355 hasConcept C121332964 @default.
• W4295308355 hasConcept C127413603 @default.
• W4295308355 hasConcept C165005293 @default.
• W4295308355 hasConcept C171250308 @default.
• W4295308355 hasConcept C17525397 @default.
• W4295308355 hasConcept C184720557 @default.
• W4295308355 hasConcept C192562407 @default.
• W4295308355 hasConcept C206755178 @default.
• W4295308355 hasConcept C21200559 @default.
• W4295308355 hasConcept C24326235 @default.
• W4295308355 hasConcept C30066665 @default.
• W4295308355 hasConcept C37977207 @default.
• W4295308355 hasConcept C49040817 @default.
• W4295308355 hasConcept C62520636 @default.
• W4295308355 hasConcept C77170095 @default.
• W4295308355 hasConceptScore W4295308355C102951782 @default.
• W4295308355 hasConceptScore W4295308355C119473381 @default.
• W4295308355 hasConceptScore W4295308355C119599485 @default.
• W4295308355 hasConceptScore W4295308355C121332964 @default.
• W4295308355 hasConceptScore W4295308355C127413603 @default.
• W4295308355 hasConceptScore W4295308355C165005293 @default.
• W4295308355 hasConceptScore W4295308355C171250308 @default.
• W4295308355 hasConceptScore W4295308355C17525397 @default.
• W4295308355 hasConceptScore W4295308355C184720557 @default.
• W4295308355 hasConceptScore W4295308355C192562407 @default.
• W4295308355 hasConceptScore W4295308355C206755178 @default.
• W4295308355 hasConceptScore W4295308355C21200559 @default.
• W4295308355 hasConceptScore W4295308355C24326235 @default.
• W4295308355 hasConceptScore W4295308355C30066665 @default.
• W4295308355 hasConceptScore W4295308355C37977207 @default.
• W4295308355 hasConceptScore W4295308355C49040817 @default.
• W4295308355 hasConceptScore W4295308355C62520636 @default.
• W4295308355 hasConceptScore W4295308355C77170095 @default.
• W4295308355 hasFunder F4320321001 @default.
• W4295308355 hasFunder F4320321543 @default.
• W4295308355 hasFunder F4320335791 @default.

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