Matches in SemOpenAlex for { <https://semopenalex.org/work/W4295308771> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W4295308771 abstract "The effects of dielectric constant, damage layer thickness, line aspect ratio, and linewidth ratio on Back-End-of-Line (BEOL) line capacitance are evaluated for line pitches down to 18nm using field-solver simulations. At fine pitches such as 18nm, the damage layer thickness becomes increasingly important. We demonstrate when it may be beneficial to choose a higher-dielectric-constant material which does not create a damage layer, over a somewhat lower-dielectric-constant material. We also show the capacitive effects of metal aspect ratio, and metal width ratio, on 18nm-pitch wires." @default.
- W4295308771 created "2022-09-12" @default.
- W4295308771 creator A5007631381 @default.
- W4295308771 creator A5024705337 @default.
- W4295308771 date "2022-06-27" @default.
- W4295308771 modified "2023-09-23" @default.
- W4295308771 title "Capacitive Impacts of Etch-Induced Dielectric Damage in Highly-Scaled Interconnect Architectures" @default.
- W4295308771 cites W2400294317 @default.
- W4295308771 cites W2914348563 @default.
- W4295308771 cites W3088183200 @default.
- W4295308771 cites W2885955165 @default.
- W4295308771 doi "https://doi.org/10.1109/iitc52079.2022.9881314" @default.
- W4295308771 hasPublicationYear "2022" @default.
- W4295308771 type Work @default.
- W4295308771 citedByCount "0" @default.
- W4295308771 crossrefType "proceedings-article" @default.
- W4295308771 hasAuthorship W4295308771A5007631381 @default.
- W4295308771 hasAuthorship W4295308771A5024705337 @default.
- W4295308771 hasConcept C119599485 @default.
- W4295308771 hasConcept C120665830 @default.
- W4295308771 hasConcept C121332964 @default.
- W4295308771 hasConcept C123745756 @default.
- W4295308771 hasConcept C127413603 @default.
- W4295308771 hasConcept C133386390 @default.
- W4295308771 hasConcept C142181693 @default.
- W4295308771 hasConcept C147789679 @default.
- W4295308771 hasConcept C159985019 @default.
- W4295308771 hasConcept C17525397 @default.
- W4295308771 hasConcept C185592680 @default.
- W4295308771 hasConcept C192562407 @default.
- W4295308771 hasConcept C198352243 @default.
- W4295308771 hasConcept C199360897 @default.
- W4295308771 hasConcept C206755178 @default.
- W4295308771 hasConcept C24326235 @default.
- W4295308771 hasConcept C2524010 @default.
- W4295308771 hasConcept C2776628375 @default.
- W4295308771 hasConcept C2777027219 @default.
- W4295308771 hasConcept C2779227376 @default.
- W4295308771 hasConcept C30066665 @default.
- W4295308771 hasConcept C33923547 @default.
- W4295308771 hasConcept C41008148 @default.
- W4295308771 hasConcept C49040817 @default.
- W4295308771 hasConcept C520434653 @default.
- W4295308771 hasConcept C76155785 @default.
- W4295308771 hasConcept C82558694 @default.
- W4295308771 hasConceptScore W4295308771C119599485 @default.
- W4295308771 hasConceptScore W4295308771C120665830 @default.
- W4295308771 hasConceptScore W4295308771C121332964 @default.
- W4295308771 hasConceptScore W4295308771C123745756 @default.
- W4295308771 hasConceptScore W4295308771C127413603 @default.
- W4295308771 hasConceptScore W4295308771C133386390 @default.
- W4295308771 hasConceptScore W4295308771C142181693 @default.
- W4295308771 hasConceptScore W4295308771C147789679 @default.
- W4295308771 hasConceptScore W4295308771C159985019 @default.
- W4295308771 hasConceptScore W4295308771C17525397 @default.
- W4295308771 hasConceptScore W4295308771C185592680 @default.
- W4295308771 hasConceptScore W4295308771C192562407 @default.
- W4295308771 hasConceptScore W4295308771C198352243 @default.
- W4295308771 hasConceptScore W4295308771C199360897 @default.
- W4295308771 hasConceptScore W4295308771C206755178 @default.
- W4295308771 hasConceptScore W4295308771C24326235 @default.
- W4295308771 hasConceptScore W4295308771C2524010 @default.
- W4295308771 hasConceptScore W4295308771C2776628375 @default.
- W4295308771 hasConceptScore W4295308771C2777027219 @default.
- W4295308771 hasConceptScore W4295308771C2779227376 @default.
- W4295308771 hasConceptScore W4295308771C30066665 @default.
- W4295308771 hasConceptScore W4295308771C33923547 @default.
- W4295308771 hasConceptScore W4295308771C41008148 @default.
- W4295308771 hasConceptScore W4295308771C49040817 @default.
- W4295308771 hasConceptScore W4295308771C520434653 @default.
- W4295308771 hasConceptScore W4295308771C76155785 @default.
- W4295308771 hasConceptScore W4295308771C82558694 @default.
- W4295308771 hasLocation W42953087711 @default.
- W4295308771 hasOpenAccess W4295308771 @default.
- W4295308771 hasPrimaryLocation W42953087711 @default.
- W4295308771 hasRelatedWork W1528032045 @default.
- W4295308771 hasRelatedWork W1994753809 @default.
- W4295308771 hasRelatedWork W2010390859 @default.
- W4295308771 hasRelatedWork W2021714583 @default.
- W4295308771 hasRelatedWork W2043673973 @default.
- W4295308771 hasRelatedWork W2080359341 @default.
- W4295308771 hasRelatedWork W2134342517 @default.
- W4295308771 hasRelatedWork W2166660005 @default.
- W4295308771 hasRelatedWork W2182670477 @default.
- W4295308771 hasRelatedWork W4254418869 @default.
- W4295308771 isParatext "false" @default.
- W4295308771 isRetracted "false" @default.
- W4295308771 workType "article" @default.