Matches in SemOpenAlex for { <https://semopenalex.org/work/W4295308795> ?p ?o ?g. }
Showing items 1 to 96 of
96
with 100 items per page.
- W4295308795 abstract "We propose a new TSV fabrication process using electroless plating of a barrier metal layer in TSV, and succeeding direct electroplating of Cu on the barrier without Cu seed layer. The conformal and thick ( > 50 nm) CoWB barrier layer deposition inside a high aspect ratio TSV enables direct electro-plating of Cu from top to bottom of TSV entirely. Uniformity of CoWB thickness is within 10 % in 8-inch wafer. Furthermore, we successfully fabricated a daisy chain of TSVs of 1200 steps and evaluated electrical properties. Excellent endurance property of the TSV daisy chain was obtained without any change of the resistance. This technology is promising for the 3D LSIs that uses high aspect ratio TSVs." @default.
- W4295308795 created "2022-09-12" @default.
- W4295308795 creator A5000135087 @default.
- W4295308795 creator A5005879454 @default.
- W4295308795 creator A5009339094 @default.
- W4295308795 creator A5016807224 @default.
- W4295308795 creator A5018859016 @default.
- W4295308795 creator A5066617949 @default.
- W4295308795 creator A5067629492 @default.
- W4295308795 creator A5082537726 @default.
- W4295308795 date "2022-06-27" @default.
- W4295308795 modified "2023-10-03" @default.
- W4295308795 title "TSV fabrication technology using direct electroplating of Cu on the electroless plated barrier metal" @default.
- W4295308795 cites W2069389247 @default.
- W4295308795 cites W2079367006 @default.
- W4295308795 cites W2573926654 @default.
- W4295308795 cites W2810785834 @default.
- W4295308795 doi "https://doi.org/10.1109/iitc52079.2022.9881324" @default.
- W4295308795 hasPublicationYear "2022" @default.
- W4295308795 type Work @default.
- W4295308795 citedByCount "2" @default.
- W4295308795 countsByYear W42953087952022 @default.
- W4295308795 countsByYear W42953087952023 @default.
- W4295308795 crossrefType "proceedings-article" @default.
- W4295308795 hasAuthorship W4295308795A5000135087 @default.
- W4295308795 hasAuthorship W4295308795A5005879454 @default.
- W4295308795 hasAuthorship W4295308795A5009339094 @default.
- W4295308795 hasAuthorship W4295308795A5016807224 @default.
- W4295308795 hasAuthorship W4295308795A5018859016 @default.
- W4295308795 hasAuthorship W4295308795A5066617949 @default.
- W4295308795 hasAuthorship W4295308795A5067629492 @default.
- W4295308795 hasAuthorship W4295308795A5082537726 @default.
- W4295308795 hasConcept C119599485 @default.
- W4295308795 hasConcept C127313418 @default.
- W4295308795 hasConcept C127413603 @default.
- W4295308795 hasConcept C136525101 @default.
- W4295308795 hasConcept C142724271 @default.
- W4295308795 hasConcept C151730666 @default.
- W4295308795 hasConcept C159985019 @default.
- W4295308795 hasConcept C160671074 @default.
- W4295308795 hasConcept C191897082 @default.
- W4295308795 hasConcept C192562407 @default.
- W4295308795 hasConcept C204787440 @default.
- W4295308795 hasConcept C2776985018 @default.
- W4295308795 hasConcept C2779227376 @default.
- W4295308795 hasConcept C2779833192 @default.
- W4295308795 hasConcept C2816523 @default.
- W4295308795 hasConcept C29216876 @default.
- W4295308795 hasConcept C45632049 @default.
- W4295308795 hasConcept C49040817 @default.
- W4295308795 hasConcept C51807945 @default.
- W4295308795 hasConcept C59014099 @default.
- W4295308795 hasConcept C64297162 @default.
- W4295308795 hasConcept C71924100 @default.
- W4295308795 hasConcept C8058405 @default.
- W4295308795 hasConcept C86803240 @default.
- W4295308795 hasConceptScore W4295308795C119599485 @default.
- W4295308795 hasConceptScore W4295308795C127313418 @default.
- W4295308795 hasConceptScore W4295308795C127413603 @default.
- W4295308795 hasConceptScore W4295308795C136525101 @default.
- W4295308795 hasConceptScore W4295308795C142724271 @default.
- W4295308795 hasConceptScore W4295308795C151730666 @default.
- W4295308795 hasConceptScore W4295308795C159985019 @default.
- W4295308795 hasConceptScore W4295308795C160671074 @default.
- W4295308795 hasConceptScore W4295308795C191897082 @default.
- W4295308795 hasConceptScore W4295308795C192562407 @default.
- W4295308795 hasConceptScore W4295308795C204787440 @default.
- W4295308795 hasConceptScore W4295308795C2776985018 @default.
- W4295308795 hasConceptScore W4295308795C2779227376 @default.
- W4295308795 hasConceptScore W4295308795C2779833192 @default.
- W4295308795 hasConceptScore W4295308795C2816523 @default.
- W4295308795 hasConceptScore W4295308795C29216876 @default.
- W4295308795 hasConceptScore W4295308795C45632049 @default.
- W4295308795 hasConceptScore W4295308795C49040817 @default.
- W4295308795 hasConceptScore W4295308795C51807945 @default.
- W4295308795 hasConceptScore W4295308795C59014099 @default.
- W4295308795 hasConceptScore W4295308795C64297162 @default.
- W4295308795 hasConceptScore W4295308795C71924100 @default.
- W4295308795 hasConceptScore W4295308795C8058405 @default.
- W4295308795 hasConceptScore W4295308795C86803240 @default.
- W4295308795 hasLocation W42953087951 @default.
- W4295308795 hasOpenAccess W4295308795 @default.
- W4295308795 hasPrimaryLocation W42953087951 @default.
- W4295308795 hasRelatedWork W1980882639 @default.
- W4295308795 hasRelatedWork W1993611956 @default.
- W4295308795 hasRelatedWork W2072148751 @default.
- W4295308795 hasRelatedWork W2085960099 @default.
- W4295308795 hasRelatedWork W2087565007 @default.
- W4295308795 hasRelatedWork W2103252801 @default.
- W4295308795 hasRelatedWork W2113587853 @default.
- W4295308795 hasRelatedWork W2153956411 @default.
- W4295308795 hasRelatedWork W2367144121 @default.
- W4295308795 hasRelatedWork W2379489181 @default.
- W4295308795 isParatext "false" @default.
- W4295308795 isRetracted "false" @default.
- W4295308795 workType "article" @default.