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• W4296079322 endingPage "100681" @default.
• W4296079322 startingPage "100675" @default.
• W4296079322 abstract "Tungsten has been commonly used for fine interconnects due to its good gap-filling characteristics in 3D molds, such as trench patterns. However, tungsten shows high deposition stress. This causes mold distortion because tungsten has low ad-atom mobility, and diffusion-driven relaxation does not occur. To reduce tungsten’s deposition stress, the shape of the nuclei can be controlled, which is an effective way to suppress the mechanical deformation caused by the formation of a grain boundary between free surfaces during the coalescence stage. In this study, elliptical tungsten nuclei with various aspect ratios, which suppress coalescence in the early stage of deposition, were proposed to reduce the deposition stress. Stress was calculated using the finite element method (FEM) in the range of 0.5 to 8 radius ratios of the tungsten nuclei. The bending of the trench mold was calculated due to tungsten stress and additional coalescence between films during the filling process. As a result, the wider the elliptical nucleus was, the lower the film stress, and mold bending between line patterns was also reduced. The defects in the depth and width of the periodic trench influenced the mold bending in the early growth stage and the stage of coalescence between films, respectively." @default.
• W4296079322 created "2022-09-17" @default.
• W4296079322 creator A5022428895 @default.
• W4296079322 creator A5049504914 @default.
• W4296079322 creator A5051694185 @default.
• W4296079322 creator A5083829802 @default.
• W4296079322 creator A5085943012 @default.
• W4296079322 date "2022-01-01" @default.
• W4296079322 modified "2023-09-25" @default.
• W4296079322 title "Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape" @default.
• W4296079322 cites W1528043334 @default.
• W4296079322 cites W1966162671 @default.
• W4296079322 cites W1971966678 @default.
• W4296079322 cites W1975978561 @default.
• W4296079322 cites W1982181644 @default.
• W4296079322 cites W1990263989 @default.
• W4296079322 cites W1990860871 @default.
• W4296079322 cites W2003021967 @default.
• W4296079322 cites W2003749274 @default.
• W4296079322 cites W2004802131 @default.
• W4296079322 cites W2017959015 @default.
• W4296079322 cites W2046665168 @default.
• W4296079322 cites W2048900392 @default.
• W4296079322 cites W2052137108 @default.
• W4296079322 cites W2058242026 @default.
• W4296079322 cites W2066043566 @default.
• W4296079322 cites W2069795925 @default.
• W4296079322 cites W2071640854 @default.
• W4296079322 cites W2073675832 @default.
• W4296079322 cites W2094260924 @default.
• W4296079322 cites W2104386725 @default.
• W4296079322 cites W2106867908 @default.
• W4296079322 cites W2114685911 @default.
• W4296079322 cites W2130252409 @default.
• W4296079322 cites W2142429416 @default.
• W4296079322 cites W2151613126 @default.
• W4296079322 cites W2167903456 @default.
• W4296079322 cites W2268817145 @default.
• W4296079322 cites W2996146227 @default.
• W4296079322 doi "https://doi.org/10.1109/access.2022.3207284" @default.
• W4296079322 hasPublicationYear "2022" @default.
• W4296079322 type Work @default.
• W4296079322 citedByCount "0" @default.
• W4296079322 crossrefType "journal-article" @default.
• W4296079322 hasAuthorship W4296079322A5022428895 @default.
• W4296079322 hasAuthorship W4296079322A5049504914 @default.
• W4296079322 hasAuthorship W4296079322A5051694185 @default.
• W4296079322 hasAuthorship W4296079322A5083829802 @default.
• W4296079322 hasAuthorship W4296079322A5085943012 @default.
• W4296079322 hasBestOaLocation W42960793221 @default.
• W4296079322 hasConcept C121332964 @default.
• W4296079322 hasConcept C127313418 @default.
• W4296079322 hasConcept C138885662 @default.
• W4296079322 hasConcept C149792144 @default.
• W4296079322 hasConcept C151730666 @default.
• W4296079322 hasConcept C155310634 @default.
• W4296079322 hasConcept C159985019 @default.
• W4296079322 hasConcept C191897082 @default.
• W4296079322 hasConcept C192562407 @default.
• W4296079322 hasConcept C21036866 @default.
• W4296079322 hasConcept C2779227376 @default.
• W4296079322 hasConcept C2780566776 @default.
• W4296079322 hasConcept C2816523 @default.
• W4296079322 hasConcept C41895202 @default.
• W4296079322 hasConcept C542268612 @default.
• W4296079322 hasConcept C64297162 @default.
• W4296079322 hasConcept C87355193 @default.
• W4296079322 hasConceptScore W4296079322C121332964 @default.
• W4296079322 hasConceptScore W4296079322C127313418 @default.
• W4296079322 hasConceptScore W4296079322C138885662 @default.
• W4296079322 hasConceptScore W4296079322C149792144 @default.
• W4296079322 hasConceptScore W4296079322C151730666 @default.
• W4296079322 hasConceptScore W4296079322C155310634 @default.
• W4296079322 hasConceptScore W4296079322C159985019 @default.
• W4296079322 hasConceptScore W4296079322C191897082 @default.
• W4296079322 hasConceptScore W4296079322C192562407 @default.
• W4296079322 hasConceptScore W4296079322C21036866 @default.
• W4296079322 hasConceptScore W4296079322C2779227376 @default.
• W4296079322 hasConceptScore W4296079322C2780566776 @default.
• W4296079322 hasConceptScore W4296079322C2816523 @default.
• W4296079322 hasConceptScore W4296079322C41895202 @default.
• W4296079322 hasConceptScore W4296079322C542268612 @default.
• W4296079322 hasConceptScore W4296079322C64297162 @default.
• W4296079322 hasConceptScore W4296079322C87355193 @default.
• W4296079322 hasFunder F4320332195 @default.
• W4296079322 hasLocation W42960793221 @default.
• W4296079322 hasLocation W42960793222 @default.
• W4296079322 hasOpenAccess W4296079322 @default.
• W4296079322 hasPrimaryLocation W42960793221 @default.
• W4296079322 hasRelatedWork W2082293200 @default.
• W4296079322 hasRelatedWork W2137307547 @default.
• W4296079322 hasRelatedWork W2380293314 @default.
• W4296079322 hasRelatedWork W2392190330 @default.
• W4296079322 hasRelatedWork W2943188944 @default.
• W4296079322 hasRelatedWork W3008690834 @default.
• W4296079322 hasRelatedWork W3082440218 @default.
• W4296079322 hasRelatedWork W4207045224 @default.
• W4296079322 hasRelatedWork W4242480814 @default.

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