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• W4297425356 abstract "The process method of a Si 3 N 4 ceramic sealed cavity is realized by vacuum brazing and chemical reaction at 1,100°C and 0.5 MPa pressure. Through the combination of Si 3 N 4 ceramic polishing and thinning, inductively coupled plasma etching, and high-temperature metal filler (Ti-Zr-Cu-Ni) brazing process, a vacuum-sealed cavity suitable for high-temperature environments was prepared. The cross section of the bonding interface was characterized by scanning electron microscope (SEM) and energy dispersive spectrometer (EDS), which indicated that the two Si 3 N 4 ceramic were well bonded, the cavity structure remained intact, and the bonding interface strength exceeded 5.13 MPa. Furthermore, it retained its strong bonding strength after in high-temperature environments of 1,000, 1,050, and 1,100°C for 1 h. This indicates that a brazed vacuum-sealed cavity can be used in high-temperature environments. Through the proposed method, pressure sensor that can withstand high temperatures can be developed." @default.
• W4297425356 created "2022-09-28" @default.
• W4297425356 creator A5032447166 @default.
• W4297425356 creator A5033003246 @default.
• W4297425356 creator A5036092856 @default.
• W4297425356 creator A5046428044 @default.
• W4297425356 creator A5046575186 @default.
• W4297425356 creator A5054341902 @default.
• W4297425356 creator A5057965580 @default.
• W4297425356 date "2022-09-27" @default.
• W4297425356 modified "2023-10-16" @default.
• W4297425356 title "Process method of Si3N4 ceramic brazing sealed cavity for high-temperature application" @default.
• W4297425356 cites W2117849280 @default.
• W4297425356 cites W2752576934 @default.
• W4297425356 cites W2755758603 @default.
• W4297425356 cites W2762811874 @default.
• W4297425356 cites W2887763212 @default.
• W4297425356 cites W2906346666 @default.
• W4297425356 cites W2917001673 @default.
• W4297425356 cites W2949590727 @default.
• W4297425356 cites W2980699835 @default.
• W4297425356 cites W2980990158 @default.
• W4297425356 cites W2981365296 @default.
• W4297425356 cites W3008756797 @default.
• W4297425356 cites W3015458366 @default.
• W4297425356 cites W3048820294 @default.
• W4297425356 cites W3118611877 @default.
• W4297425356 cites W3164569546 @default.
• W4297425356 cites W3168467459 @default.
• W4297425356 cites W3176772382 @default.
• W4297425356 cites W3194477393 @default.
• W4297425356 cites W3198872200 @default.
• W4297425356 cites W3201129035 @default.
• W4297425356 cites W3203690245 @default.
• W4297425356 cites W3208513360 @default.
• W4297425356 cites W4205479755 @default.
• W4297425356 cites W4206600684 @default.
• W4297425356 cites W4213247435 @default.
• W4297425356 cites W4214480347 @default.
• W4297425356 cites W4239645033 @default.
• W4297425356 cites W4381986099 @default.
• W4297425356 doi "https://doi.org/10.3389/fchem.2022.1019822" @default.
• W4297425356 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/36238103" @default.
• W4297425356 hasPublicationYear "2022" @default.
• W4297425356 type Work @default.
• W4297425356 citedByCount "0" @default.
• W4297425356 crossrefType "journal-article" @default.
• W4297425356 hasAuthorship W4297425356A5032447166 @default.
• W4297425356 hasAuthorship W4297425356A5033003246 @default.
• W4297425356 hasAuthorship W4297425356A5036092856 @default.
• W4297425356 hasAuthorship W4297425356A5046428044 @default.
• W4297425356 hasAuthorship W4297425356A5046575186 @default.
• W4297425356 hasAuthorship W4297425356A5054341902 @default.
• W4297425356 hasAuthorship W4297425356A5057965580 @default.
• W4297425356 hasBestOaLocation W42974253561 @default.
• W4297425356 hasConcept C113196181 @default.
• W4297425356 hasConcept C134132462 @default.
• W4297425356 hasConcept C138113353 @default.
• W4297425356 hasConcept C159096172 @default.
• W4297425356 hasConcept C159985019 @default.
• W4297425356 hasConcept C185592680 @default.
• W4297425356 hasConcept C192562407 @default.
• W4297425356 hasConcept C26771246 @default.
• W4297425356 hasConcept C2779227376 @default.
• W4297425356 hasConcept C2780026712 @default.
• W4297425356 hasConcept C43617362 @default.
• W4297425356 hasConcept C68928338 @default.
• W4297425356 hasConcept C86171150 @default.
• W4297425356 hasConceptScore W4297425356C113196181 @default.
• W4297425356 hasConceptScore W4297425356C134132462 @default.
• W4297425356 hasConceptScore W4297425356C138113353 @default.
• W4297425356 hasConceptScore W4297425356C159096172 @default.
• W4297425356 hasConceptScore W4297425356C159985019 @default.
• W4297425356 hasConceptScore W4297425356C185592680 @default.
• W4297425356 hasConceptScore W4297425356C192562407 @default.
• W4297425356 hasConceptScore W4297425356C26771246 @default.
• W4297425356 hasConceptScore W4297425356C2779227376 @default.
• W4297425356 hasConceptScore W4297425356C2780026712 @default.
• W4297425356 hasConceptScore W4297425356C43617362 @default.
• W4297425356 hasConceptScore W4297425356C68928338 @default.
• W4297425356 hasConceptScore W4297425356C86171150 @default.
• W4297425356 hasLocation W42974253561 @default.
• W4297425356 hasLocation W42974253562 @default.
• W4297425356 hasLocation W42974253563 @default.
• W4297425356 hasLocation W42974253564 @default.
• W4297425356 hasOpenAccess W4297425356 @default.
• W4297425356 hasPrimaryLocation W42974253561 @default.
• W4297425356 hasRelatedWork W1512319868 @default.
• W4297425356 hasRelatedWork W1897472292 @default.
• W4297425356 hasRelatedWork W2043615407 @default.
• W4297425356 hasRelatedWork W2044306010 @default.
• W4297425356 hasRelatedWork W2281145519 @default.
• W4297425356 hasRelatedWork W2387616028 @default.
• W4297425356 hasRelatedWork W2902891674 @default.
• W4297425356 hasRelatedWork W3142786840 @default.
• W4297425356 hasRelatedWork W4323636779 @default.
• W4297425356 hasRelatedWork W1524744694 @default.
• W4297425356 hasVolume "10" @default.
• W4297425356 isParatext "false" @default.
• W4297425356 isRetracted "false" @default.

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