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- W4297946191 abstract "The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115{deg} at a fixed wavelength of 1525 nm. A spot size of 0.11{deg} has been measured at boresight, consistent with theory. We demonstrate SRN as a viable material choice for chip-scale OPA applications due to its high thermo-optic coefficient, high optical power handling capacity due to negligible two-photon absorption (TPA), wide transparency window, low propagation loss, and CMOS compatibility." @default.
- W4297946191 created "2022-10-01" @default.
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- W4297946191 date "2022-09-27" @default.
- W4297946191 modified "2023-10-08" @default.
- W4297946191 title "Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride" @default.
- W4297946191 doi "https://doi.org/10.48550/arxiv.2209.13229" @default.
- W4297946191 hasPublicationYear "2022" @default.
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