Matches in SemOpenAlex for { <https://semopenalex.org/work/W4298122699> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W4298122699 endingPage "232" @default.
- W4298122699 startingPage "227" @default.
- W4298122699 abstract "The objective of this study is to consider candidate materials for Cu-Cu direct bonding as advanced interconnect technology using Nanoporous Cu materials. Nanoporous Cu structure can be obtained by two kinds of electroplating process. One is the direct porous plating process by additive which can form Nanoporous structure directly. The other is de-alloying process which can form Nanoporous structure by de-alloying of Cu-X alloy. By using electroplated Nanoporous Cu structure, we compared the property of Nanoporous structure and carried out the bonding test. Nanoporous structure shows higher bonding strength because of its unique properties. The possibility that Nanoporous Cu is promising materials for advanced bonding technology was confirmed." @default.
- W4298122699 created "2022-10-01" @default.
- W4298122699 creator A5003310820 @default.
- W4298122699 creator A5020032124 @default.
- W4298122699 creator A5029032607 @default.
- W4298122699 creator A5035221178 @default.
- W4298122699 creator A5043512386 @default.
- W4298122699 creator A5057795943 @default.
- W4298122699 date "2022-09-10" @default.
- W4298122699 modified "2023-10-06" @default.
- W4298122699 title "Study for Cu-Cu Bonding Technology by Nanoporous Cu Structure" @default.
- W4298122699 cites W2742519254 @default.
- W4298122699 cites W2767940321 @default.
- W4298122699 cites W4230391816 @default.
- W4298122699 doi "https://doi.org/10.7791/jspmee.11.227" @default.
- W4298122699 hasPublicationYear "2022" @default.
- W4298122699 type Work @default.
- W4298122699 citedByCount "1" @default.
- W4298122699 countsByYear W42981226992023 @default.
- W4298122699 crossrefType "journal-article" @default.
- W4298122699 hasAuthorship W4298122699A5003310820 @default.
- W4298122699 hasAuthorship W4298122699A5020032124 @default.
- W4298122699 hasAuthorship W4298122699A5029032607 @default.
- W4298122699 hasAuthorship W4298122699A5035221178 @default.
- W4298122699 hasAuthorship W4298122699A5043512386 @default.
- W4298122699 hasAuthorship W4298122699A5057795943 @default.
- W4298122699 hasBestOaLocation W42981226991 @default.
- W4298122699 hasConcept C127313418 @default.
- W4298122699 hasConcept C159985019 @default.
- W4298122699 hasConcept C171250308 @default.
- W4298122699 hasConcept C191897082 @default.
- W4298122699 hasConcept C192562407 @default.
- W4298122699 hasConcept C2776985018 @default.
- W4298122699 hasConcept C2779227376 @default.
- W4298122699 hasConcept C2780026712 @default.
- W4298122699 hasConcept C2984173401 @default.
- W4298122699 hasConcept C48940184 @default.
- W4298122699 hasConcept C51807945 @default.
- W4298122699 hasConcept C544778455 @default.
- W4298122699 hasConcept C6648577 @default.
- W4298122699 hasConcept C8058405 @default.
- W4298122699 hasConceptScore W4298122699C127313418 @default.
- W4298122699 hasConceptScore W4298122699C159985019 @default.
- W4298122699 hasConceptScore W4298122699C171250308 @default.
- W4298122699 hasConceptScore W4298122699C191897082 @default.
- W4298122699 hasConceptScore W4298122699C192562407 @default.
- W4298122699 hasConceptScore W4298122699C2776985018 @default.
- W4298122699 hasConceptScore W4298122699C2779227376 @default.
- W4298122699 hasConceptScore W4298122699C2780026712 @default.
- W4298122699 hasConceptScore W4298122699C2984173401 @default.
- W4298122699 hasConceptScore W4298122699C48940184 @default.
- W4298122699 hasConceptScore W4298122699C51807945 @default.
- W4298122699 hasConceptScore W4298122699C544778455 @default.
- W4298122699 hasConceptScore W4298122699C6648577 @default.
- W4298122699 hasConceptScore W4298122699C8058405 @default.
- W4298122699 hasIssue "5" @default.
- W4298122699 hasLocation W42981226991 @default.
- W4298122699 hasOpenAccess W4298122699 @default.
- W4298122699 hasPrimaryLocation W42981226991 @default.
- W4298122699 hasRelatedWork W2024810080 @default.
- W4298122699 hasRelatedWork W2039945307 @default.
- W4298122699 hasRelatedWork W2320014217 @default.
- W4298122699 hasRelatedWork W2348921829 @default.
- W4298122699 hasRelatedWork W2354455210 @default.
- W4298122699 hasRelatedWork W2357275884 @default.
- W4298122699 hasRelatedWork W2365153197 @default.
- W4298122699 hasRelatedWork W2382404259 @default.
- W4298122699 hasRelatedWork W2392504503 @default.
- W4298122699 hasRelatedWork W2516246445 @default.
- W4298122699 hasVolume "11" @default.
- W4298122699 isParatext "false" @default.
- W4298122699 isRetracted "false" @default.
- W4298122699 workType "article" @default.