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- W4298345141 abstract "We experimentally demonstrate record low median insertion loss (1.3 dB, O-band) in 0° single-polarization grating couplers consisting of a single-etch c-Si layer with a patterned SiN overlay, fabricated with 193nm DUV immersion lithography on 300mm wafers." @default.
- W4298345141 created "2022-10-02" @default.
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- W4298345141 date "2022-07-03" @default.
- W4298345141 modified "2023-09-30" @default.
- W4298345141 title "Inverse-Designed Dual Layer c-Si/SiN Vertical Grating Couplers Tested on 300mm Wafers" @default.
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- W4298345141 doi "https://doi.org/10.23919/oecc/psc53152.2022.9850091" @default.
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