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- W4299584141 abstract "Abstract Electron beam induced current (EBIC) analysis is a versatile tool that can be used by anyone with access to a SEM. This article explains how failure analysts are using the EBIC mode in SEMs to detect junction and oxide defects, simplify junction delineation, and reveal subsurface damage through multiple layers of metallization." @default.
- W4299584141 created "2022-10-02" @default.
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- W4299584141 date "2000-02-01" @default.
- W4299584141 modified "2023-10-05" @default.
- W4299584141 title "Electron Beam Induced Current Isolation Techniques" @default.
- W4299584141 doi "https://doi.org/10.31399/asm.edfa.2000-1.p001" @default.
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