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- W4300488612 abstract "Piezoelectric Micro-electro-mechanical systems (MEMS) resonators have been attracted wide interest due to their excellent properties, such as complementary metal oxide semiconductor (CMOS)-process compatibility, low acoustic loss and multiple frequencies on a chip. However, it remains challenge to obtain a high quality factor (Q) because of its strong mechanical losses into the substrates. In this work, a novel Winding-Frame-Structure (WFS) thin-film piezoelectric-on-silicon (TPoS) resonator with tortuous routings is proposed. In comparison with the conventional resonators and frame-structure resonators suspended by the traditional straight tethers, the proposed WFS resonator has less mechanical energy loss into the anchoring substrate according to the effect of mechanical vibration isolation, thereby reducing the anchor loss. By finite element analysis (FEA) simulations, the anchor quality factor (Q <inf xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>anchor</inf> ) of WFS resonator is achieved 35-fold and 4-fold improvement than that of the conventional resonators and frame-structure resonators, respectively, implying the reduction of insertion loss in the devices." @default.
- W4300488612 created "2022-10-03" @default.
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- W4300488612 date "2022-07-18" @default.
- W4300488612 modified "2023-10-16" @default.
- W4300488612 title "A Winding-Frame-Structure Thin-Film MEMS Resonator for Quality Factor Improvement" @default.
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- W4300488612 doi "https://doi.org/10.1109/ic-mam55200.2022.9855354" @default.
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