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- W4300843487 abstract "MODELING OF 18O TRACER STUDIES OF THE OXYGEN REDISTRIBUTION DURING FORMATION OF Si02 LAYERS BY HIGH DOSE IMPLANTATION was published in EPM 87. Energy Pulse and Particle Beam Modification of Materials on page 430." @default.
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- W4300843487 date "1988-12-31" @default.
- W4300843487 modified "2023-09-27" @default.
- W4300843487 title "MODELING OF <sup>18</sup>O TRACER STUDIES OF THE OXYGEN REDISTRIBUTION DURING FORMATION OF Si02 LAYERS BY HIGH DOSE IMPLANTATION" @default.
- W4300843487 doi "https://doi.org/10.1515/9783112611203-110" @default.
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