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- W4301486599 abstract "Abstract Single contact optical beam induced currents (SCOBIC) is a variation on the OBIC failure analysis technique that requires only one point of contact with the junction being examined. This article discusses the basic principles of this new method and how it compares with OBIC in terms of measurement performance. It also presents examples showing how SCOBIC can be used to analyze CMOS devices from the front and back side without need for complex FIB and microprobing procedures." @default.
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- W4301486599 date "2001-11-01" @default.
- W4301486599 modified "2023-10-18" @default.
- W4301486599 title "Recent Development: Single Contact Optical Beam Induced Currents (SCOBIC) – Technique and Applications" @default.
- W4301486599 doi "https://doi.org/10.31399/asm.edfa.2001-4.p029" @default.
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